Details
| Original language | English |
|---|---|
| Pages (from-to) | 269-274 |
| Number of pages | 6 |
| Journal | Materials Research Society Symposium - Proceedings |
| Volume | 539 |
| Publication status | Published - 1999 |
| Event | 1998 MRS Fall Meeting - The Symposium 'Advanced Catalytic Materials-1998' - Boston, MA, USA Duration: 30 Nov 1998 → 3 Dec 1998 |
Abstract
In this work a study of the nature as well as an evaluation of the thermal-mechanical stress in aluminum interconnects was carried out. A theoretical model describes the atom flux which can be induced by the relaxation of the stress. Based on this theory an algorithm has been developed and integrated into the finite element simulation software. This algorithm allows the calculation of the mass flux divergence and prediction of the failure location before the damage occurs. For the verification of this algorithm an aluminum pad structure sputtered on thermal oxide layer was used. The failure location was correlated with in situ observation during the long term stress tests. Experimental results confirm that the observed structure degradations correspond with the simulations very well.
ASJC Scopus subject areas
- Materials Science(all)
- Physics and Astronomy(all)
- Condensed Matter Physics
- Engineering(all)
- Mechanics of Materials
- Engineering(all)
- Mechanical Engineering
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In: Materials Research Society Symposium - Proceedings, Vol. 539, 1999, p. 269-274.
Research output: Contribution to journal › Conference article › Research › peer review
}
TY - JOUR
T1 - Finite element analysis of thermal-mechanical stress induced failure in interconnects
AU - Yu, X.
AU - Weide, K.
N1 - Copyright: Copyright 2007 Elsevier B.V., All rights reserved.
PY - 1999
Y1 - 1999
N2 - In this work a study of the nature as well as an evaluation of the thermal-mechanical stress in aluminum interconnects was carried out. A theoretical model describes the atom flux which can be induced by the relaxation of the stress. Based on this theory an algorithm has been developed and integrated into the finite element simulation software. This algorithm allows the calculation of the mass flux divergence and prediction of the failure location before the damage occurs. For the verification of this algorithm an aluminum pad structure sputtered on thermal oxide layer was used. The failure location was correlated with in situ observation during the long term stress tests. Experimental results confirm that the observed structure degradations correspond with the simulations very well.
AB - In this work a study of the nature as well as an evaluation of the thermal-mechanical stress in aluminum interconnects was carried out. A theoretical model describes the atom flux which can be induced by the relaxation of the stress. Based on this theory an algorithm has been developed and integrated into the finite element simulation software. This algorithm allows the calculation of the mass flux divergence and prediction of the failure location before the damage occurs. For the verification of this algorithm an aluminum pad structure sputtered on thermal oxide layer was used. The failure location was correlated with in situ observation during the long term stress tests. Experimental results confirm that the observed structure degradations correspond with the simulations very well.
UR - http://www.scopus.com/inward/record.url?scp=0032591889&partnerID=8YFLogxK
M3 - Conference article
AN - SCOPUS:0032591889
VL - 539
SP - 269
EP - 274
JO - Materials Research Society Symposium - Proceedings
JF - Materials Research Society Symposium - Proceedings
SN - 0272-9172
T2 - 1998 MRS Fall Meeting - The Symposium 'Advanced Catalytic Materials-1998'
Y2 - 30 November 1998 through 3 December 1998
ER -