Details
| Original language | English |
|---|---|
| Pages (from-to) | 1-10 |
| Number of pages | 10 |
| Journal | Light: Advanced Manufacturing |
| Volume | 4 |
| Issue number | 4 |
| Early online date | 16 Nov 2023 |
| Publication status | Published - 2023 |
Abstract
The demand for miniaturization and integration of optical elements has fostered the development of various micro- and nanofabrication technologies. In this work, we developed a low-cost UV-LED-based microscope projection photolithography system for rapid and high-resolution fabrication. This system can be easily implemented using off-the-shelf components. It allows for micro- and nanostructuring within seconds. By optimizing the process, a minimum feature size down to approximately 85 nm was successfully realized. In addition, investigations on fabrication of the same structures using both costly and economic microscope objectives were performed. Feature sizes below 100 nm can be stably achieved. The demonstrated approach extends the technology capabilities and may find applications in fields such as nanophotonics, biophotonics sensing and material science.
Keywords
- Microfabrication, Nanofabrication, Projection lithography, Subwavelength structuring, UV-LED lithography
ASJC Scopus subject areas
- Engineering(all)
- Industrial and Manufacturing Engineering
- Materials Science(all)
- Materials Science (miscellaneous)
- Materials Science(all)
- Metals and Alloys
- Physics and Astronomy(all)
- Instrumentation
Cite this
- Standard
- Harvard
- Apa
- Vancouver
- BibTeX
- RIS
In: Light: Advanced Manufacturing, Vol. 4, No. 4, 2023, p. 1-10.
Research output: Contribution to journal › Article › Research › peer review
}
TY - JOUR
T1 - Feature size below 100 nm realized by UV-LED- based microscope projection photolithography
AU - Zheng, Lei
AU - Birr, Tobias
AU - Zywietz, Urs
AU - Reinhardt, Carsten
AU - Roth, Bernhard
N1 - Funding Information: The authors acknowledge the financial support from the German Research Foundation (DFG) under Germany’s Excellence Strategy within the Cluster of Excellence PhoenixD (EXC 2122, Project ID 390833453).
PY - 2023
Y1 - 2023
N2 - The demand for miniaturization and integration of optical elements has fostered the development of various micro- and nanofabrication technologies. In this work, we developed a low-cost UV-LED-based microscope projection photolithography system for rapid and high-resolution fabrication. This system can be easily implemented using off-the-shelf components. It allows for micro- and nanostructuring within seconds. By optimizing the process, a minimum feature size down to approximately 85 nm was successfully realized. In addition, investigations on fabrication of the same structures using both costly and economic microscope objectives were performed. Feature sizes below 100 nm can be stably achieved. The demonstrated approach extends the technology capabilities and may find applications in fields such as nanophotonics, biophotonics sensing and material science.
AB - The demand for miniaturization and integration of optical elements has fostered the development of various micro- and nanofabrication technologies. In this work, we developed a low-cost UV-LED-based microscope projection photolithography system for rapid and high-resolution fabrication. This system can be easily implemented using off-the-shelf components. It allows for micro- and nanostructuring within seconds. By optimizing the process, a minimum feature size down to approximately 85 nm was successfully realized. In addition, investigations on fabrication of the same structures using both costly and economic microscope objectives were performed. Feature sizes below 100 nm can be stably achieved. The demonstrated approach extends the technology capabilities and may find applications in fields such as nanophotonics, biophotonics sensing and material science.
KW - Microfabrication
KW - Nanofabrication
KW - Projection lithography
KW - Subwavelength structuring
KW - UV-LED lithography
UR - http://www.scopus.com/inward/record.url?scp=85183312906&partnerID=8YFLogxK
U2 - 10.37188/lam.2023.033
DO - 10.37188/lam.2023.033
M3 - Article
AN - SCOPUS:85183312906
VL - 4
SP - 1
EP - 10
JO - Light: Advanced Manufacturing
JF - Light: Advanced Manufacturing
SN - 2689-9620
IS - 4
ER -