Details
| Original language | English |
|---|---|
| Title of host publication | Modeling Aspects in Optical Metrology III |
| Number of pages | 9 |
| Publication status | Published - 23 May 2011 |
| Event | Modeling Aspects in Optical Metrology III - Munich, Germany Duration: 23 May 2011 → 24 May 2011 |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Volume | 8083 |
| ISSN (Print) | 0277-786X |
Abstract
The quality test is one of the main components of a production process. The main task of the quality test is the inspection of the relevant geometry parts concerning the predefined tolerance range. To verify, that the relevant geometry parts can be detected with a measurement uncertainty, which is less than the predefined tolerance range, multiple measurements of an appropriate reference specimen have to be done. The related time and money effort is very high and can be reduced using a numerical simulation of the whole measurement process. The measurement uncertainty can be estimated using a virtual measurement process and Monte-Carlo methods. Using the combination of the simulation and Monte-Carlo methods, it is, for example, possible, to calculate the optimal alignment of the workpiece within the measurement volume. Thereby, the optimality criterion can be defined as a minimum of the measurement uncertainty or as a hollistic measurement. In addition to the estimation of uncertainties, it is possible to use the virtual measurement system as part of an assistance system. The assistance system should provide measurement strategies with respect to different criteria, like the minimisation of the measurement uncertainty. This is the field of research of the subproject B5 of the collaborative research centre 489 (CRC 489), funded by the German Research Foundation (DFG). The main task is the setup of a virtual multisensor assistance system for the calculation of optimised work piece adapted measurement strategies. In this paper the virtual measurement system and process of a shadow projection system will be explained in detail. Besides the mathematical model, a verification of the simulation and a concept for the estimation of measurement uncertainties will be given.
Keywords
- Estimation of measurement uncertainties, Fast numerical simulation, Shadow projection, Virtual measurement system, Virtual multisensor assistance system
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Computer Science Applications
- Mathematics(all)
- Applied Mathematics
- Engineering(all)
- Electrical and Electronic Engineering
Cite this
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Modeling Aspects in Optical Metrology III. 2011. 80830G (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8083).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Fast virtual shadow projection system as part of a virtual multisensor assistance system
AU - Haskamp, Klaus
AU - Kästner, Markus
AU - Reithmeier, Eduard
PY - 2011/5/23
Y1 - 2011/5/23
N2 - The quality test is one of the main components of a production process. The main task of the quality test is the inspection of the relevant geometry parts concerning the predefined tolerance range. To verify, that the relevant geometry parts can be detected with a measurement uncertainty, which is less than the predefined tolerance range, multiple measurements of an appropriate reference specimen have to be done. The related time and money effort is very high and can be reduced using a numerical simulation of the whole measurement process. The measurement uncertainty can be estimated using a virtual measurement process and Monte-Carlo methods. Using the combination of the simulation and Monte-Carlo methods, it is, for example, possible, to calculate the optimal alignment of the workpiece within the measurement volume. Thereby, the optimality criterion can be defined as a minimum of the measurement uncertainty or as a hollistic measurement. In addition to the estimation of uncertainties, it is possible to use the virtual measurement system as part of an assistance system. The assistance system should provide measurement strategies with respect to different criteria, like the minimisation of the measurement uncertainty. This is the field of research of the subproject B5 of the collaborative research centre 489 (CRC 489), funded by the German Research Foundation (DFG). The main task is the setup of a virtual multisensor assistance system for the calculation of optimised work piece adapted measurement strategies. In this paper the virtual measurement system and process of a shadow projection system will be explained in detail. Besides the mathematical model, a verification of the simulation and a concept for the estimation of measurement uncertainties will be given.
AB - The quality test is one of the main components of a production process. The main task of the quality test is the inspection of the relevant geometry parts concerning the predefined tolerance range. To verify, that the relevant geometry parts can be detected with a measurement uncertainty, which is less than the predefined tolerance range, multiple measurements of an appropriate reference specimen have to be done. The related time and money effort is very high and can be reduced using a numerical simulation of the whole measurement process. The measurement uncertainty can be estimated using a virtual measurement process and Monte-Carlo methods. Using the combination of the simulation and Monte-Carlo methods, it is, for example, possible, to calculate the optimal alignment of the workpiece within the measurement volume. Thereby, the optimality criterion can be defined as a minimum of the measurement uncertainty or as a hollistic measurement. In addition to the estimation of uncertainties, it is possible to use the virtual measurement system as part of an assistance system. The assistance system should provide measurement strategies with respect to different criteria, like the minimisation of the measurement uncertainty. This is the field of research of the subproject B5 of the collaborative research centre 489 (CRC 489), funded by the German Research Foundation (DFG). The main task is the setup of a virtual multisensor assistance system for the calculation of optimised work piece adapted measurement strategies. In this paper the virtual measurement system and process of a shadow projection system will be explained in detail. Besides the mathematical model, a verification of the simulation and a concept for the estimation of measurement uncertainties will be given.
KW - Estimation of measurement uncertainties
KW - Fast numerical simulation
KW - Shadow projection
KW - Virtual measurement system
KW - Virtual multisensor assistance system
UR - http://www.scopus.com/inward/record.url?scp=79958034087&partnerID=8YFLogxK
U2 - 10.1117/12.883026
DO - 10.1117/12.883026
M3 - Conference contribution
AN - SCOPUS:79958034087
SN - 9780819486790
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Modeling Aspects in Optical Metrology III
T2 - Modeling Aspects in Optical Metrology III
Y2 - 23 May 2011 through 24 May 2011
ER -