Details
| Original language | English |
|---|---|
| Title of host publication | Optical Measurement Systems for Industrial Inspection VI |
| Publication status | Published - 17 Jun 2009 |
| Externally published | Yes |
| Event | Optical Measurement Systems for Industrial Inspection VI - Munich, Germany Duration: 15 Jun 2009 → 18 Jun 2009 |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Volume | 7389 |
| ISSN (Print) | 0277-786X |
Abstract
Optical scatter measurements are the basis for efficient methods in the quality management of optical components in all production steps. Especially, the Total Scattering (TS) of an optical surface can be evaluated in respect of the roughness and the state of cleanliness. In many applications defects on the surface or the imperfections in the bulk of the components are of major interest and have to be controlled systematically. In this paper a fast TS measurement procedure is presented for flat components, which can map a surface completely in the timescale of few ten to hundred seconds. The mapping covers the entire test area with spatial steps of less than one micron. The set-up can be adapted to wavelengths from the UV- to the IR- spectral ranges. The present study is dedicated to the technical specifications, problems during implementation and the resolution limits of the Fast TS set-up. TS measurements on samples with defined micro structures are employed to demonstrate the spatial resolution. Results of TS measurements in forward and backward direction will be presented for selected samples with defined particle distribution and sizes.
Keywords
- ISO 13696, Micro- and Nanoparticles, Surface inspection, Total Scattering
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Computer Science Applications
- Mathematics(all)
- Applied Mathematics
- Engineering(all)
- Electrical and Electronic Engineering
Cite this
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- Harvard
- Apa
- Vancouver
- BibTeX
- RIS
Optical Measurement Systems for Industrial Inspection VI. 2009. 73890S (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 7389).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Fast Total Scattering facility for 2D inspection of optical and functional surfaces
AU - Kadkhoda, Puja
AU - Sakiew, Wjatscheslaw
AU - Günster, Stefan
AU - Ristau, Detlev
PY - 2009/6/17
Y1 - 2009/6/17
N2 - Optical scatter measurements are the basis for efficient methods in the quality management of optical components in all production steps. Especially, the Total Scattering (TS) of an optical surface can be evaluated in respect of the roughness and the state of cleanliness. In many applications defects on the surface or the imperfections in the bulk of the components are of major interest and have to be controlled systematically. In this paper a fast TS measurement procedure is presented for flat components, which can map a surface completely in the timescale of few ten to hundred seconds. The mapping covers the entire test area with spatial steps of less than one micron. The set-up can be adapted to wavelengths from the UV- to the IR- spectral ranges. The present study is dedicated to the technical specifications, problems during implementation and the resolution limits of the Fast TS set-up. TS measurements on samples with defined micro structures are employed to demonstrate the spatial resolution. Results of TS measurements in forward and backward direction will be presented for selected samples with defined particle distribution and sizes.
AB - Optical scatter measurements are the basis for efficient methods in the quality management of optical components in all production steps. Especially, the Total Scattering (TS) of an optical surface can be evaluated in respect of the roughness and the state of cleanliness. In many applications defects on the surface or the imperfections in the bulk of the components are of major interest and have to be controlled systematically. In this paper a fast TS measurement procedure is presented for flat components, which can map a surface completely in the timescale of few ten to hundred seconds. The mapping covers the entire test area with spatial steps of less than one micron. The set-up can be adapted to wavelengths from the UV- to the IR- spectral ranges. The present study is dedicated to the technical specifications, problems during implementation and the resolution limits of the Fast TS set-up. TS measurements on samples with defined micro structures are employed to demonstrate the spatial resolution. Results of TS measurements in forward and backward direction will be presented for selected samples with defined particle distribution and sizes.
KW - ISO 13696
KW - Micro- and Nanoparticles
KW - Surface inspection
KW - Total Scattering
UR - http://www.scopus.com/inward/record.url?scp=69949150303&partnerID=8YFLogxK
U2 - 10.1117/12.827864
DO - 10.1117/12.827864
M3 - Conference contribution
AN - SCOPUS:69949150303
SN - 9780819476722
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Optical Measurement Systems for Industrial Inspection VI
T2 - Optical Measurement Systems for Industrial Inspection VI
Y2 - 15 June 2009 through 18 June 2009
ER -