Details
| Original language | English |
|---|---|
| Title of host publication | Optical Systems Design 2015 |
| Subtitle of host publication | Optical Fabrication, Testing, and Metrology V |
| Publisher | SPIE |
| ISBN (electronic) | 9781628418170 |
| Publication status | Published - 24 Sept 2015 |
| Externally published | Yes |
| Event | Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V - Jena, Germany Duration: 7 Sept 2015 → 10 Sept 2015 |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Volume | 9628 |
| ISSN (Print) | 0277-786X |
| ISSN (electronic) | 1996-756X |
Abstract
A system for two dimensional mapping of Total Scattering (TS) and Transmission (T) of optical flat surfaces in the spectral range from deep UV to NIR will be introduced. The adaptation of the scatter detector concept for the special requirements of the DUV range will be discussed. Also, the specifications of the set-up such as working ambient, background level, and data calibration procedure demonstrate the performance of the system for the analytical tasks in industrial optics production. On the basis of the presented measurement facility, the essential properties of bare flat optics in respect of their polishing state, roughness level, state of cleaning and defect distribution can be investigated with the TS system in a nondestructive way. The homogeneity of the whole surface of an optical component can be tested with a defined lateral resolution. The knowledge of the inhomogeneity is an important indication for the quality evaluation of optical components. We present the TS result and the calculated defect density distributions of selected components, which are handled by different cleaning procedures. Also, additional effects in TS and T will be outlined and compared with spectral photometric measurement.
Keywords
- Defect detection, DUV spectral range, ISO 13696, Total Scattering, Transmission
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Computer Science Applications
- Mathematics(all)
- Applied Mathematics
- Engineering(all)
- Electrical and Electronic Engineering
Cite this
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Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V. SPIE, 2015. 96280N (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9628).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Facility for fast mapping of total scattering and transmission in the spectral range from DUV- NIR
AU - Kadkhoda, P.
AU - Jensen, Lars
AU - Ristau, Detlev
PY - 2015/9/24
Y1 - 2015/9/24
N2 - A system for two dimensional mapping of Total Scattering (TS) and Transmission (T) of optical flat surfaces in the spectral range from deep UV to NIR will be introduced. The adaptation of the scatter detector concept for the special requirements of the DUV range will be discussed. Also, the specifications of the set-up such as working ambient, background level, and data calibration procedure demonstrate the performance of the system for the analytical tasks in industrial optics production. On the basis of the presented measurement facility, the essential properties of bare flat optics in respect of their polishing state, roughness level, state of cleaning and defect distribution can be investigated with the TS system in a nondestructive way. The homogeneity of the whole surface of an optical component can be tested with a defined lateral resolution. The knowledge of the inhomogeneity is an important indication for the quality evaluation of optical components. We present the TS result and the calculated defect density distributions of selected components, which are handled by different cleaning procedures. Also, additional effects in TS and T will be outlined and compared with spectral photometric measurement.
AB - A system for two dimensional mapping of Total Scattering (TS) and Transmission (T) of optical flat surfaces in the spectral range from deep UV to NIR will be introduced. The adaptation of the scatter detector concept for the special requirements of the DUV range will be discussed. Also, the specifications of the set-up such as working ambient, background level, and data calibration procedure demonstrate the performance of the system for the analytical tasks in industrial optics production. On the basis of the presented measurement facility, the essential properties of bare flat optics in respect of their polishing state, roughness level, state of cleaning and defect distribution can be investigated with the TS system in a nondestructive way. The homogeneity of the whole surface of an optical component can be tested with a defined lateral resolution. The knowledge of the inhomogeneity is an important indication for the quality evaluation of optical components. We present the TS result and the calculated defect density distributions of selected components, which are handled by different cleaning procedures. Also, additional effects in TS and T will be outlined and compared with spectral photometric measurement.
KW - Defect detection
KW - DUV spectral range
KW - ISO 13696
KW - Total Scattering
KW - Transmission
UR - http://www.scopus.com/inward/record.url?scp=84960496064&partnerID=8YFLogxK
U2 - 10.1117/12.2191311
DO - 10.1117/12.2191311
M3 - Conference contribution
AN - SCOPUS:84960496064
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Optical Systems Design 2015
PB - SPIE
T2 - Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V
Y2 - 7 September 2015 through 10 September 2015
ER -