Details
| Original language | English |
|---|---|
| Article number | 026002 |
| Journal | Laser physics letters |
| Volume | 15 |
| Issue number | 2 |
| Publication status | Published - 1 Oct 2018 |
| Externally published | Yes |
Abstract
This paper describes a new approach to the fabrication of superconducting nanowire single-photon detectors from ultrathin NbN films on SiO2 substrates. The technology is based on nonlinear femtosecond optical lithography and includes direct formation of the sensitive element of the detector (the meander) through femtosecond laser exposure of the polymethyl methacrylate resist at a wavelength of 525 nm and subsequent removal of NbN using plasma-chemical etching. The nonlinear femtosecond optical lithography method allows the formation of planar structures with a spatial resolution of ∼50 nm. These structures were used to fabricate single-photon superconducting detectors with quantum efficiency no worse than 8% at a wavelength of 1310 nm and dark count rate of 10 s-1 at liquid helium temperature.
Keywords
- femtosecond lithography, nanostructures, optical lithography, single-photon detector
ASJC Scopus subject areas
- Physics and Astronomy(all)
- Instrumentation
- Physics and Astronomy(all)
- Physics and Astronomy (miscellaneous)
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In: Laser physics letters, Vol. 15, No. 2, 026002, 01.10.2018.
Research output: Contribution to journal › Article › Research › peer review
}
TY - JOUR
T1 - Fabrication of superconducting nanowire single-photon detectors by nonlinear femtosecond optical lithography
AU - Minaev, N. V.
AU - Tarkhov, M. A.
AU - Dudova, D. S.
AU - Timashev, P. S.
AU - Chichkov, B. N.
AU - Bagratashvili, V. N.
N1 - Funding information: This work was supported by a grant from the government of the Russian Federation for state support of scientific research under the guidance of leading scientists (contract 14.B25.31.0019).
PY - 2018/10/1
Y1 - 2018/10/1
N2 - This paper describes a new approach to the fabrication of superconducting nanowire single-photon detectors from ultrathin NbN films on SiO2 substrates. The technology is based on nonlinear femtosecond optical lithography and includes direct formation of the sensitive element of the detector (the meander) through femtosecond laser exposure of the polymethyl methacrylate resist at a wavelength of 525 nm and subsequent removal of NbN using plasma-chemical etching. The nonlinear femtosecond optical lithography method allows the formation of planar structures with a spatial resolution of ∼50 nm. These structures were used to fabricate single-photon superconducting detectors with quantum efficiency no worse than 8% at a wavelength of 1310 nm and dark count rate of 10 s-1 at liquid helium temperature.
AB - This paper describes a new approach to the fabrication of superconducting nanowire single-photon detectors from ultrathin NbN films on SiO2 substrates. The technology is based on nonlinear femtosecond optical lithography and includes direct formation of the sensitive element of the detector (the meander) through femtosecond laser exposure of the polymethyl methacrylate resist at a wavelength of 525 nm and subsequent removal of NbN using plasma-chemical etching. The nonlinear femtosecond optical lithography method allows the formation of planar structures with a spatial resolution of ∼50 nm. These structures were used to fabricate single-photon superconducting detectors with quantum efficiency no worse than 8% at a wavelength of 1310 nm and dark count rate of 10 s-1 at liquid helium temperature.
KW - femtosecond lithography
KW - nanostructures
KW - optical lithography
KW - single-photon detector
UR - http://www.scopus.com/inward/record.url?scp=85043482264&partnerID=8YFLogxK
U2 - 10.1088/1612-202x/aa8bd1
DO - 10.1088/1612-202x/aa8bd1
M3 - Article
AN - SCOPUS:85043482264
VL - 15
JO - Laser physics letters
JF - Laser physics letters
SN - 1612-2011
IS - 2
M1 - 026002
ER -