Fabrication of an integrated optical system in glass using laser assisted manufacturing

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Original languageEnglish
Title of host publicationNovel Optical Systems, Methods, and Applications XXIV
EditorsCornelius F. Hahlweg, Joseph R. Mulley
PublisherSPIE
ISBN (electronic)9781510644687
Publication statusPublished - 2021
EventNovel Optical Systems, Methods, and Applications XXIV 2021 - San Diego, United States
Duration: 1 Aug 20215 Aug 2021
Conference number: 24

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume11815
ISSN (Print)0277-786X
ISSN (electronic)1996-756X

Abstract

While glass is an ideal material for optics, only a few microprocessing technologies are available. These technologies are usually limited regarding precision and freedom of design. A novel glass micromachining process is Laser Induced Deep Etching (LIDE). Without generating micro-cracks, introducing stress or other damages, it offers the possibility to precisely machine many types of glass. A broad range of features such as high-aspect ratio through holes, cutouts and slits in glass are available. In this work, LIDE is used to produce glass carrier substrates for integrated optical systems. Due to transmission characteristics and refractive index, the glass can be used as optical cladding for integrated polymer optical waveguides (refractive indices < 1.45). Cavities in glass, which can have different cross-sections e.g. u- or v-shaped, are filled with photoactive material by a doctor blade and function as an optical waveguide core. An additional approach examined in this work is the integration of optical fiber into v-shaped cavities. The system uses bare die laser diodes as transmitters and photo diodes as receivers bonded in front of the waveguide. LIDE technology allows to passively align the manufactured optical waveguide in front of the light source and detector due to mechanical features in the carrier substrate itself, eliminating the need for time-consuming and complex active alignment processes. This paper shows geometrical characteristics of waveguides and cavities, with a particular focus on surface roughness and subsequent filling ratio of the optical waveguide. Furthermore, the relative intensity distribution in the waveguide is presented and analyzed.

Keywords

    Laser structuring, Optical system, Optoelectronic packaging, Thin glass, Waveguide manufacturing

ASJC Scopus subject areas

Cite this

Fabrication of an integrated optical system in glass using laser assisted manufacturing. / Reitz, B.; Hoffmann, G. A.; Gottwald, S. N. et al.
Novel Optical Systems, Methods, and Applications XXIV. ed. / Cornelius F. Hahlweg; Joseph R. Mulley. SPIE, 2021. 118150B (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 11815).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Reitz, B, Hoffmann, GA, Gottwald, SN & Overmeyer, L 2021, Fabrication of an integrated optical system in glass using laser assisted manufacturing. in CF Hahlweg & JR Mulley (eds), Novel Optical Systems, Methods, and Applications XXIV., 118150B, Proceedings of SPIE - The International Society for Optical Engineering, vol. 11815, SPIE, Novel Optical Systems, Methods, and Applications XXIV 2021, San Diego, United States, 1 Aug 2021. https://doi.org/10.1117/12.2596376
Reitz, B., Hoffmann, G. A., Gottwald, S. N., & Overmeyer, L. (2021). Fabrication of an integrated optical system in glass using laser assisted manufacturing. In C. F. Hahlweg, & J. R. Mulley (Eds.), Novel Optical Systems, Methods, and Applications XXIV Article 118150B (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 11815). SPIE. https://doi.org/10.1117/12.2596376
Reitz B, Hoffmann GA, Gottwald SN, Overmeyer L. Fabrication of an integrated optical system in glass using laser assisted manufacturing. In Hahlweg CF, Mulley JR, editors, Novel Optical Systems, Methods, and Applications XXIV. SPIE. 2021. 118150B. (Proceedings of SPIE - The International Society for Optical Engineering). Epub 2021 Sept 7. doi: 10.1117/12.2596376
Reitz, B. ; Hoffmann, G. A. ; Gottwald, S. N. et al. / Fabrication of an integrated optical system in glass using laser assisted manufacturing. Novel Optical Systems, Methods, and Applications XXIV. editor / Cornelius F. Hahlweg ; Joseph R. Mulley. SPIE, 2021. (Proceedings of SPIE - The International Society for Optical Engineering).
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title = "Fabrication of an integrated optical system in glass using laser assisted manufacturing",
abstract = "While glass is an ideal material for optics, only a few microprocessing technologies are available. These technologies are usually limited regarding precision and freedom of design. A novel glass micromachining process is Laser Induced Deep Etching (LIDE). Without generating micro-cracks, introducing stress or other damages, it offers the possibility to precisely machine many types of glass. A broad range of features such as high-aspect ratio through holes, cutouts and slits in glass are available. In this work, LIDE is used to produce glass carrier substrates for integrated optical systems. Due to transmission characteristics and refractive index, the glass can be used as optical cladding for integrated polymer optical waveguides (refractive indices < 1.45). Cavities in glass, which can have different cross-sections e.g. u- or v-shaped, are filled with photoactive material by a doctor blade and function as an optical waveguide core. An additional approach examined in this work is the integration of optical fiber into v-shaped cavities. The system uses bare die laser diodes as transmitters and photo diodes as receivers bonded in front of the waveguide. LIDE technology allows to passively align the manufactured optical waveguide in front of the light source and detector due to mechanical features in the carrier substrate itself, eliminating the need for time-consuming and complex active alignment processes. This paper shows geometrical characteristics of waveguides and cavities, with a particular focus on surface roughness and subsequent filling ratio of the optical waveguide. Furthermore, the relative intensity distribution in the waveguide is presented and analyzed. ",
keywords = "Laser structuring, Optical system, Optoelectronic packaging, Thin glass, Waveguide manufacturing",
author = "B. Reitz and Hoffmann, {G. A.} and Gottwald, {S. N.} and L. Overmeyer",
note = "Funding Information: I would like to give special thanks to the company LPKF and especially to Sergej Schneider, who advised me through important discussions and produced the samples I needed. I would also like to thank my colleagues Lennart J{\"u}tte, Moritz Hinkelmann, and Juan Franco Garcia for their support in the lab and Gerd-Albert Hoffmann for technical assistance. This research was funded by the Deutsche Forschungsgemeinschaft (DFG, German Research Foundation) under Germany{\textquoteright}s Excellence Strategy within the Cluster of Excellence PhoenixD (EXC 2122, Project ID 390833453). ; Novel Optical Systems, Methods, and Applications XXIV 2021 ; Conference date: 01-08-2021 Through 05-08-2021",
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T1 - Fabrication of an integrated optical system in glass using laser assisted manufacturing

AU - Reitz, B.

AU - Hoffmann, G. A.

AU - Gottwald, S. N.

AU - Overmeyer, L.

N1 - Conference code: 24

PY - 2021

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N2 - While glass is an ideal material for optics, only a few microprocessing technologies are available. These technologies are usually limited regarding precision and freedom of design. A novel glass micromachining process is Laser Induced Deep Etching (LIDE). Without generating micro-cracks, introducing stress or other damages, it offers the possibility to precisely machine many types of glass. A broad range of features such as high-aspect ratio through holes, cutouts and slits in glass are available. In this work, LIDE is used to produce glass carrier substrates for integrated optical systems. Due to transmission characteristics and refractive index, the glass can be used as optical cladding for integrated polymer optical waveguides (refractive indices < 1.45). Cavities in glass, which can have different cross-sections e.g. u- or v-shaped, are filled with photoactive material by a doctor blade and function as an optical waveguide core. An additional approach examined in this work is the integration of optical fiber into v-shaped cavities. The system uses bare die laser diodes as transmitters and photo diodes as receivers bonded in front of the waveguide. LIDE technology allows to passively align the manufactured optical waveguide in front of the light source and detector due to mechanical features in the carrier substrate itself, eliminating the need for time-consuming and complex active alignment processes. This paper shows geometrical characteristics of waveguides and cavities, with a particular focus on surface roughness and subsequent filling ratio of the optical waveguide. Furthermore, the relative intensity distribution in the waveguide is presented and analyzed.

AB - While glass is an ideal material for optics, only a few microprocessing technologies are available. These technologies are usually limited regarding precision and freedom of design. A novel glass micromachining process is Laser Induced Deep Etching (LIDE). Without generating micro-cracks, introducing stress or other damages, it offers the possibility to precisely machine many types of glass. A broad range of features such as high-aspect ratio through holes, cutouts and slits in glass are available. In this work, LIDE is used to produce glass carrier substrates for integrated optical systems. Due to transmission characteristics and refractive index, the glass can be used as optical cladding for integrated polymer optical waveguides (refractive indices < 1.45). Cavities in glass, which can have different cross-sections e.g. u- or v-shaped, are filled with photoactive material by a doctor blade and function as an optical waveguide core. An additional approach examined in this work is the integration of optical fiber into v-shaped cavities. The system uses bare die laser diodes as transmitters and photo diodes as receivers bonded in front of the waveguide. LIDE technology allows to passively align the manufactured optical waveguide in front of the light source and detector due to mechanical features in the carrier substrate itself, eliminating the need for time-consuming and complex active alignment processes. This paper shows geometrical characteristics of waveguides and cavities, with a particular focus on surface roughness and subsequent filling ratio of the optical waveguide. Furthermore, the relative intensity distribution in the waveguide is presented and analyzed.

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KW - Optical system

KW - Optoelectronic packaging

KW - Thin glass

KW - Waveguide manufacturing

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