Details
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the 18 international conference of the european society for precision engineering and nanotechnology |
| Editors | O. Riemer, Enrico Savio, D. Billington, R. K. Leach, D. Phillips |
| Pages | 163-164 |
| Number of pages | 2 |
| Publication status | Published - 1 Jan 2018 |
| Event | 18th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2018 - Venice, Italy Duration: 4 Jun 2018 → 8 Jun 2018 |
Keywords
- Piezoelectric properties, PZT sensor, Sputtering process, Ultrasonic wire bonding
ASJC Scopus subject areas
- Engineering(all)
- Industrial and Manufacturing Engineering
- Physics and Astronomy(all)
- Instrumentation
- Environmental Science(all)
- Environmental Engineering
- Engineering(all)
- Mechanical Engineering
- Materials Science(all)
- General Materials Science
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Proceedings of the 18 international conference of the european society for precision engineering and nanotechnology. ed. / O. Riemer; Enrico Savio; D. Billington; R. K. Leach; D. Phillips. 2018. p. 163-164.
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Fabrication and characterization of high-speed PZT sensors for the investigation of ultrasonic wire bonding process
AU - Isaak, Andreas
AU - Long, Yangyang
AU - Asadi, Esmail
AU - Wurz, Marc
AU - Twiefel, Jens
AU - Wallaschek, Jörg
PY - 2018/1/1
Y1 - 2018/1/1
KW - Piezoelectric properties
KW - PZT sensor
KW - Sputtering process
KW - Ultrasonic wire bonding
UR - http://www.scopus.com/inward/record.url?scp=85054479958&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:85054479958
SN - 9780995775121
SP - 163
EP - 164
BT - Proceedings of the 18 international conference of the european society for precision engineering and nanotechnology
A2 - Riemer, O.
A2 - Savio, Enrico
A2 - Billington, D.
A2 - Leach, R. K.
A2 - Phillips, D.
T2 - 18th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2018
Y2 - 4 June 2018 through 8 June 2018
ER -