Details
| Original language | English |
|---|---|
| Title of host publication | 42nd Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials |
| Subtitle of host publication | 2010 |
| Publication status | Published - 6 Dec 2010 |
| Event | 42nd Annual Laser Damage Symposium: Laser-Induced Damage in Optical Materials: 2010 - Boulder, CO, United States Duration: 26 Sept 2010 → 29 Sept 2010 |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Volume | 7842 |
| ISSN (Print) | 0277-786X |
Abstract
The paper presents results of investigations in evaporated LaF 3-MgF2 and LaF3-AlF3 classical high-reflecting multilayers deposited on super-polished CaF2 substrates. In addition to typical spectroscopic inspections up to the band edge of fluoride substances in the VUV spectral range, the work is dedicated to the determination of laser-induced damage threshold at moderate pulse numbers for the wavelength 193 nm. Further on, dose dependent irradiation tests are performed well below the fluence level of damage onset indicating changes for the spectral transfer functions. These experimental observations are discussed in order to find a correlation to the characteristic damage behavior of both material combinations. In contrast to the standard evaporation process, partial-reflecting fluoride coatings have been deposited under ion-assisted conditions with fluorine gas. Results of damage tests will show excellent performance to high fluence levels.
Keywords
- fluorine assisted deposition, ISO11254-2, LIDT, metal fluoride composites, thermal evaporation
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Computer Science Applications
- Mathematics(all)
- Applied Mathematics
- Engineering(all)
- Electrical and Electronic Engineering
Cite this
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- BibTeX
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42nd Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials: 2010. 2010. 78420I (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 7842).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Exposure of high-reflecting fluoride coatings under high fluence conditions at 193nm
AU - Blaschke, H.
AU - Riggers, Werner
AU - Ristau, Detlev
PY - 2010/12/6
Y1 - 2010/12/6
N2 - The paper presents results of investigations in evaporated LaF 3-MgF2 and LaF3-AlF3 classical high-reflecting multilayers deposited on super-polished CaF2 substrates. In addition to typical spectroscopic inspections up to the band edge of fluoride substances in the VUV spectral range, the work is dedicated to the determination of laser-induced damage threshold at moderate pulse numbers for the wavelength 193 nm. Further on, dose dependent irradiation tests are performed well below the fluence level of damage onset indicating changes for the spectral transfer functions. These experimental observations are discussed in order to find a correlation to the characteristic damage behavior of both material combinations. In contrast to the standard evaporation process, partial-reflecting fluoride coatings have been deposited under ion-assisted conditions with fluorine gas. Results of damage tests will show excellent performance to high fluence levels.
AB - The paper presents results of investigations in evaporated LaF 3-MgF2 and LaF3-AlF3 classical high-reflecting multilayers deposited on super-polished CaF2 substrates. In addition to typical spectroscopic inspections up to the band edge of fluoride substances in the VUV spectral range, the work is dedicated to the determination of laser-induced damage threshold at moderate pulse numbers for the wavelength 193 nm. Further on, dose dependent irradiation tests are performed well below the fluence level of damage onset indicating changes for the spectral transfer functions. These experimental observations are discussed in order to find a correlation to the characteristic damage behavior of both material combinations. In contrast to the standard evaporation process, partial-reflecting fluoride coatings have been deposited under ion-assisted conditions with fluorine gas. Results of damage tests will show excellent performance to high fluence levels.
KW - fluorine assisted deposition
KW - ISO11254-2
KW - LIDT
KW - metal fluoride composites
KW - thermal evaporation
UR - http://www.scopus.com/inward/record.url?scp=79751471022&partnerID=8YFLogxK
U2 - 10.1117/12.867257
DO - 10.1117/12.867257
M3 - Conference contribution
AN - SCOPUS:79751471022
SN - 9780819483652
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - 42nd Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials
T2 - 42nd Annual Laser Damage Symposium
Y2 - 26 September 2010 through 29 September 2010
ER -