Details
| Translated title of the contribution | Experimental validation of effective sensor properties for novel co-resonantly coupled cantilever sensors |
|---|---|
| Original language | German |
| Title of host publication | MikroSystemTechnik Kongress 2019 - Mikroelektronik | MEMS-MOEMS | Systemintegration - Saulen der Digitalisierung und kunstlichen Intelligenz, Proceedings |
| Publisher | VDE Verlag GmbH |
| Pages | 104-106 |
| Number of pages | 3 |
| ISBN (electronic) | 9783800751297 |
| Publication status | Published - 2019 |
| Externally published | Yes |
| Event | MikroSystemTechnik Congress 2019: Microelectronics, MEMS-MOEMS, System Integration - Pillars of Digitization and Artificial Intelligence - Berlin, Germany Duration: 28 Oct 2019 → 30 Oct 2019 |
Publication series
| Name | MikroSystemTechnik Kongress 2019 - Mikroelektronik MEMS-MOEMS Systemintegration - Saulen der Digitalisierung und kunstlichen Intelligenz, Proceedings |
|---|
Abstract
Co-resonant coupling of a micro- and a nanocantilever is a promising approach for increasing the sensitivity of dynamic mode cantilever sensors, while maintaining the precise and reliable oscillation detection by laser-optical means. In order to develop the concept towards applications, it is essential to model and predict the coupled system’s behaviour based on its parameters and boundary conditions (e.g. geometric properties of the beams, degree of eigenfrequency matching). It has recently been shown that this can be achieved by employing effective sensor properties. Here, a first experimental validation of the effective properties is described which hints at the conclusion that this analytical description of the system gives an accurate prediction of the behavior of a fabricated sensor.
ASJC Scopus subject areas
- Computer Science(all)
- Hardware and Architecture
- Engineering(all)
- Electrical and Electronic Engineering
- Engineering(all)
- Control and Systems Engineering
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MikroSystemTechnik Kongress 2019 - Mikroelektronik | MEMS-MOEMS | Systemintegration - Saulen der Digitalisierung und kunstlichen Intelligenz, Proceedings. VDE Verlag GmbH, 2019. p. 104-106 (MikroSystemTechnik Kongress 2019 - Mikroelektronik MEMS-MOEMS Systemintegration - Saulen der Digitalisierung und kunstlichen Intelligenz, Proceedings).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Experimentelle Untersuchung der effektiven Sensorparameter für neuartige ko-resonante Cantilever-Sensoren
AU - Körner, Julia
N1 - Publisher Copyright: © VDE VERLAG GMBH Berlin Offenbach
PY - 2019
Y1 - 2019
N2 - Co-resonant coupling of a micro- and a nanocantilever is a promising approach for increasing the sensitivity of dynamic mode cantilever sensors, while maintaining the precise and reliable oscillation detection by laser-optical means. In order to develop the concept towards applications, it is essential to model and predict the coupled system’s behaviour based on its parameters and boundary conditions (e.g. geometric properties of the beams, degree of eigenfrequency matching). It has recently been shown that this can be achieved by employing effective sensor properties. Here, a first experimental validation of the effective properties is described which hints at the conclusion that this analytical description of the system gives an accurate prediction of the behavior of a fabricated sensor.
AB - Co-resonant coupling of a micro- and a nanocantilever is a promising approach for increasing the sensitivity of dynamic mode cantilever sensors, while maintaining the precise and reliable oscillation detection by laser-optical means. In order to develop the concept towards applications, it is essential to model and predict the coupled system’s behaviour based on its parameters and boundary conditions (e.g. geometric properties of the beams, degree of eigenfrequency matching). It has recently been shown that this can be achieved by employing effective sensor properties. Here, a first experimental validation of the effective properties is described which hints at the conclusion that this analytical description of the system gives an accurate prediction of the behavior of a fabricated sensor.
UR - http://www.scopus.com/inward/record.url?scp=85096795910&partnerID=8YFLogxK
M3 - Aufsatz in Konferenzband
AN - SCOPUS:85096795910
T3 - MikroSystemTechnik Kongress 2019 - Mikroelektronik MEMS-MOEMS Systemintegration - Saulen der Digitalisierung und kunstlichen Intelligenz, Proceedings
SP - 104
EP - 106
BT - MikroSystemTechnik Kongress 2019 - Mikroelektronik | MEMS-MOEMS | Systemintegration - Saulen der Digitalisierung und kunstlichen Intelligenz, Proceedings
PB - VDE Verlag GmbH
T2 - MikroSystemTechnik Kongress 2019
Y2 - 28 October 2019 through 30 October 2019
ER -