Experimental confirmation of a numerical model of doping distribution for floating-zone silicon growth with the needle eye technique

Details

Original language	German
Title of host publication	Silicon materials science and technology
Subtitle of host publication	proceedings of the Eighth International Symposium on Silicon Materials Science and Technology
Place of Publication	Pennington
Publisher	Electrochemical Society, Inc.
Publication status	Published - 1998
Event	8th International Symposium on Silicon Materials Science and Technology - San Diego Duration: 4 May 1998 → 8 May 1998 Conference number: 8

Experimental confirmation of a numerical model of doping distribution for floating-zone silicon growth with the needle eye technique. / Lüdge, A.; Riemann, H.; Schröder, W. et al.
Silicon materials science and technology: proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. Pennington: Electrochemical Society, Inc., 1998.

Research output: Chapter in book/report/conference proceeding › Conference contribution › Research

Lüdge, A, Riemann, H, Schröder, W, Mühlbauer, A, Muiznieks, A & Raming, G 1998, Experimental confirmation of a numerical model of doping distribution for floating-zone silicon growth with the needle eye technique. in Silicon materials science and technology: proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. Electrochemical Society, Inc., Pennington, 8th International Symposium on Silicon Materials Science and Technology, San Diego, 4 May 1998.

Lüdge, A., Riemann, H., Schröder, W., Mühlbauer, A., Muiznieks, A., & Raming, G. (1998). Experimental confirmation of a numerical model of doping distribution for floating-zone silicon growth with the needle eye technique. In Silicon materials science and technology: proceedings of the Eighth International Symposium on Silicon Materials Science and Technology Electrochemical Society, Inc..

Lüdge A, Riemann H, Schröder W, Mühlbauer A, Muiznieks A, Raming G. Experimental confirmation of a numerical model of doping distribution for floating-zone silicon growth with the needle eye technique. In Silicon materials science and technology: proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. Pennington: Electrochemical Society, Inc. 1998

Lüdge, A. ; Riemann, H. ; Schröder, W. et al. / Experimental confirmation of a numerical model of doping distribution for floating-zone silicon growth with the needle eye technique. Silicon materials science and technology: proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. Pennington : Electrochemical Society, Inc., 1998.

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title = "Experimental confirmation of a numerical model of doping distribution for floating-zone silicon growth with the needle eye technique",

author = "A. L{\"u}dge and H. Riemann and W. Schr{\"o}der and Alfred M{\"u}hlbauer and Andris Muiznieks and Georg Raming",

year = "1998",

language = "Deutsch",

booktitle = "Silicon materials science and technology",

publisher = "Electrochemical Society, Inc.",

address = "USA / Vereinigte Staaten",

note = "8th International Symposium on Silicon Materials Science and Technology ; Conference date: 04-05-1998 Through 08-05-1998",

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T1 - Experimental confirmation of a numerical model of doping distribution for floating-zone silicon growth with the needle eye technique

AU - Lüdge, A.

AU - Riemann, H.

AU - Schröder, W.

AU - Mühlbauer, Alfred

AU - Muiznieks, Andris

AU - Raming, Georg

N1 - Conference code: 8

PY - 1998

Y1 - 1998

M3 - Aufsatz in Konferenzband

BT - Silicon materials science and technology

PB - Electrochemical Society, Inc.

CY - Pennington

T2 - 8th International Symposium on Silicon Materials Science and Technology

Y2 - 4 May 1998 through 8 May 1998

ER -