Excimer mirror thin film laser damage competition

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Authors

  • Christopher J. Stolz
  • Holger Blaschke
  • Lars Jensen
  • Heinrich Mädebach
  • Detlev Ristau

External Research Organisations

  • Lawrence Livermore National Laboratory
  • JENOPTIK Optical Systems GmbH
  • Laser Zentrum Hannover e.V. (LZH)
View graph of relations

Details

Original languageEnglish
Title of host publication43rd Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials
Subtitle of host publication2011
Publication statusPublished - 6 Dec 2011
Externally publishedYes
Event43rd Annual Laser Damage Symposium - Laser-Induced Damage in Optical Materials: 2011 - Boulder, CO, United States
Duration: 18 Sept 201021 Sept 2010

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8190
ISSN (Print)0277-786X

Abstract

Excimer lasers are a critical technology for the $400 billion annual market of manufactured integrated circuits. Other uses of excimer lasers include medical applications such as laser eye surgery and micro-machining industrial applications. Ultraviolet laser mirrors are used for beam steering, therefore high reliability is desired for such commercial industrial applications. A laser damage competition of excimer mirror coatings creates the opportunity to survey private industry, governmental institutions, and university labs allowing a direct laser resistance comparison of samples tested under identical conditions. The major requirement of the submitted coatings was a minimum reflectance of 97% at 193 nm at normal incidence. The choice of coating materials, design, and deposition method were left to the participant. Damage testing was performed with a 193 nm excimer laser at a pulse length of 13 ns. A double blind test assured sample and submitter anonymity so only a summary of the deposition process, coating materials, layer count and spectral results are presented. In summary, a 70× difference was seen in the twelve submitted mirror samples, with the highest laser resistant sample being deposited by resistive heating and composed of three materials (LaF3, AlF3, & MgF2). Laser resistance was strongly affected by substrate cleaning, coating deposition method, and coating material selection whereas layer count had a minimal impact.

Keywords

    damage testing, excimer laser, ISO21254-2, mirror, multilayer, nanosecond pulse length, thin film

ASJC Scopus subject areas

Cite this

Excimer mirror thin film laser damage competition. / Stolz, Christopher J.; Blaschke, Holger; Jensen, Lars et al.
43rd Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials: 2011. 2011. 819007 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8190).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Stolz, CJ, Blaschke, H, Jensen, L, Mädebach, H & Ristau, D 2011, Excimer mirror thin film laser damage competition. in 43rd Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials: 2011., 819007, Proceedings of SPIE - The International Society for Optical Engineering, vol. 8190, 43rd Annual Laser Damage Symposium - Laser-Induced Damage in Optical Materials: 2011, Boulder, CO, United States, 18 Sept 2010. https://doi.org/10.1117/12.899187
Stolz, C. J., Blaschke, H., Jensen, L., Mädebach, H., & Ristau, D. (2011). Excimer mirror thin film laser damage competition. In 43rd Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials: 2011 Article 819007 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8190). https://doi.org/10.1117/12.899187
Stolz CJ, Blaschke H, Jensen L, Mädebach H, Ristau D. Excimer mirror thin film laser damage competition. In 43rd Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials: 2011. 2011. 819007. (Proceedings of SPIE - The International Society for Optical Engineering). doi: 10.1117/12.899187
Stolz, Christopher J. ; Blaschke, Holger ; Jensen, Lars et al. / Excimer mirror thin film laser damage competition. 43rd Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials: 2011. 2011. (Proceedings of SPIE - The International Society for Optical Engineering).
Download
@inproceedings{7069ae3e0beb40819cf04e166bb0cd2e,
title = "Excimer mirror thin film laser damage competition",
abstract = "Excimer lasers are a critical technology for the $400 billion annual market of manufactured integrated circuits. Other uses of excimer lasers include medical applications such as laser eye surgery and micro-machining industrial applications. Ultraviolet laser mirrors are used for beam steering, therefore high reliability is desired for such commercial industrial applications. A laser damage competition of excimer mirror coatings creates the opportunity to survey private industry, governmental institutions, and university labs allowing a direct laser resistance comparison of samples tested under identical conditions. The major requirement of the submitted coatings was a minimum reflectance of 97% at 193 nm at normal incidence. The choice of coating materials, design, and deposition method were left to the participant. Damage testing was performed with a 193 nm excimer laser at a pulse length of 13 ns. A double blind test assured sample and submitter anonymity so only a summary of the deposition process, coating materials, layer count and spectral results are presented. In summary, a 70× difference was seen in the twelve submitted mirror samples, with the highest laser resistant sample being deposited by resistive heating and composed of three materials (LaF3, AlF3, & MgF2). Laser resistance was strongly affected by substrate cleaning, coating deposition method, and coating material selection whereas layer count had a minimal impact.",
keywords = "damage testing, excimer laser, ISO21254-2, mirror, multilayer, nanosecond pulse length, thin film",
author = "Stolz, {Christopher J.} and Holger Blaschke and Lars Jensen and Heinrich M{\"a}debach and Detlev Ristau",
year = "2011",
month = dec,
day = "6",
doi = "10.1117/12.899187",
language = "English",
isbn = "9780819488237",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "43rd Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials",
note = "43rd Annual Laser Damage Symposium - Laser-Induced Damage in Optical Materials: 2011 ; Conference date: 18-09-2010 Through 21-09-2010",

}

Download

TY - GEN

T1 - Excimer mirror thin film laser damage competition

AU - Stolz, Christopher J.

AU - Blaschke, Holger

AU - Jensen, Lars

AU - Mädebach, Heinrich

AU - Ristau, Detlev

PY - 2011/12/6

Y1 - 2011/12/6

N2 - Excimer lasers are a critical technology for the $400 billion annual market of manufactured integrated circuits. Other uses of excimer lasers include medical applications such as laser eye surgery and micro-machining industrial applications. Ultraviolet laser mirrors are used for beam steering, therefore high reliability is desired for such commercial industrial applications. A laser damage competition of excimer mirror coatings creates the opportunity to survey private industry, governmental institutions, and university labs allowing a direct laser resistance comparison of samples tested under identical conditions. The major requirement of the submitted coatings was a minimum reflectance of 97% at 193 nm at normal incidence. The choice of coating materials, design, and deposition method were left to the participant. Damage testing was performed with a 193 nm excimer laser at a pulse length of 13 ns. A double blind test assured sample and submitter anonymity so only a summary of the deposition process, coating materials, layer count and spectral results are presented. In summary, a 70× difference was seen in the twelve submitted mirror samples, with the highest laser resistant sample being deposited by resistive heating and composed of three materials (LaF3, AlF3, & MgF2). Laser resistance was strongly affected by substrate cleaning, coating deposition method, and coating material selection whereas layer count had a minimal impact.

AB - Excimer lasers are a critical technology for the $400 billion annual market of manufactured integrated circuits. Other uses of excimer lasers include medical applications such as laser eye surgery and micro-machining industrial applications. Ultraviolet laser mirrors are used for beam steering, therefore high reliability is desired for such commercial industrial applications. A laser damage competition of excimer mirror coatings creates the opportunity to survey private industry, governmental institutions, and university labs allowing a direct laser resistance comparison of samples tested under identical conditions. The major requirement of the submitted coatings was a minimum reflectance of 97% at 193 nm at normal incidence. The choice of coating materials, design, and deposition method were left to the participant. Damage testing was performed with a 193 nm excimer laser at a pulse length of 13 ns. A double blind test assured sample and submitter anonymity so only a summary of the deposition process, coating materials, layer count and spectral results are presented. In summary, a 70× difference was seen in the twelve submitted mirror samples, with the highest laser resistant sample being deposited by resistive heating and composed of three materials (LaF3, AlF3, & MgF2). Laser resistance was strongly affected by substrate cleaning, coating deposition method, and coating material selection whereas layer count had a minimal impact.

KW - damage testing

KW - excimer laser

KW - ISO21254-2

KW - mirror

KW - multilayer

KW - nanosecond pulse length

KW - thin film

UR - http://www.scopus.com/inward/record.url?scp=84856351542&partnerID=8YFLogxK

U2 - 10.1117/12.899187

DO - 10.1117/12.899187

M3 - Conference contribution

AN - SCOPUS:84856351542

SN - 9780819488237

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - 43rd Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials

T2 - 43rd Annual Laser Damage Symposium - Laser-Induced Damage in Optical Materials: 2011

Y2 - 18 September 2010 through 21 September 2010

ER -