Details
| Original language | English |
|---|---|
| Title of host publication | 43rd Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials |
| Subtitle of host publication | 2011 |
| Publication status | Published - 6 Dec 2011 |
| Externally published | Yes |
| Event | 43rd Annual Laser Damage Symposium - Laser-Induced Damage in Optical Materials: 2011 - Boulder, CO, United States Duration: 18 Sept 2010 → 21 Sept 2010 |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Volume | 8190 |
| ISSN (Print) | 0277-786X |
Abstract
Excimer lasers are a critical technology for the $400 billion annual market of manufactured integrated circuits. Other uses of excimer lasers include medical applications such as laser eye surgery and micro-machining industrial applications. Ultraviolet laser mirrors are used for beam steering, therefore high reliability is desired for such commercial industrial applications. A laser damage competition of excimer mirror coatings creates the opportunity to survey private industry, governmental institutions, and university labs allowing a direct laser resistance comparison of samples tested under identical conditions. The major requirement of the submitted coatings was a minimum reflectance of 97% at 193 nm at normal incidence. The choice of coating materials, design, and deposition method were left to the participant. Damage testing was performed with a 193 nm excimer laser at a pulse length of 13 ns. A double blind test assured sample and submitter anonymity so only a summary of the deposition process, coating materials, layer count and spectral results are presented. In summary, a 70× difference was seen in the twelve submitted mirror samples, with the highest laser resistant sample being deposited by resistive heating and composed of three materials (LaF3, AlF3, & MgF2). Laser resistance was strongly affected by substrate cleaning, coating deposition method, and coating material selection whereas layer count had a minimal impact.
Keywords
- damage testing, excimer laser, ISO21254-2, mirror, multilayer, nanosecond pulse length, thin film
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Computer Science Applications
- Mathematics(all)
- Applied Mathematics
- Engineering(all)
- Electrical and Electronic Engineering
Cite this
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- BibTeX
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43rd Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials: 2011. 2011. 819007 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8190).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Excimer mirror thin film laser damage competition
AU - Stolz, Christopher J.
AU - Blaschke, Holger
AU - Jensen, Lars
AU - Mädebach, Heinrich
AU - Ristau, Detlev
PY - 2011/12/6
Y1 - 2011/12/6
N2 - Excimer lasers are a critical technology for the $400 billion annual market of manufactured integrated circuits. Other uses of excimer lasers include medical applications such as laser eye surgery and micro-machining industrial applications. Ultraviolet laser mirrors are used for beam steering, therefore high reliability is desired for such commercial industrial applications. A laser damage competition of excimer mirror coatings creates the opportunity to survey private industry, governmental institutions, and university labs allowing a direct laser resistance comparison of samples tested under identical conditions. The major requirement of the submitted coatings was a minimum reflectance of 97% at 193 nm at normal incidence. The choice of coating materials, design, and deposition method were left to the participant. Damage testing was performed with a 193 nm excimer laser at a pulse length of 13 ns. A double blind test assured sample and submitter anonymity so only a summary of the deposition process, coating materials, layer count and spectral results are presented. In summary, a 70× difference was seen in the twelve submitted mirror samples, with the highest laser resistant sample being deposited by resistive heating and composed of three materials (LaF3, AlF3, & MgF2). Laser resistance was strongly affected by substrate cleaning, coating deposition method, and coating material selection whereas layer count had a minimal impact.
AB - Excimer lasers are a critical technology for the $400 billion annual market of manufactured integrated circuits. Other uses of excimer lasers include medical applications such as laser eye surgery and micro-machining industrial applications. Ultraviolet laser mirrors are used for beam steering, therefore high reliability is desired for such commercial industrial applications. A laser damage competition of excimer mirror coatings creates the opportunity to survey private industry, governmental institutions, and university labs allowing a direct laser resistance comparison of samples tested under identical conditions. The major requirement of the submitted coatings was a minimum reflectance of 97% at 193 nm at normal incidence. The choice of coating materials, design, and deposition method were left to the participant. Damage testing was performed with a 193 nm excimer laser at a pulse length of 13 ns. A double blind test assured sample and submitter anonymity so only a summary of the deposition process, coating materials, layer count and spectral results are presented. In summary, a 70× difference was seen in the twelve submitted mirror samples, with the highest laser resistant sample being deposited by resistive heating and composed of three materials (LaF3, AlF3, & MgF2). Laser resistance was strongly affected by substrate cleaning, coating deposition method, and coating material selection whereas layer count had a minimal impact.
KW - damage testing
KW - excimer laser
KW - ISO21254-2
KW - mirror
KW - multilayer
KW - nanosecond pulse length
KW - thin film
UR - http://www.scopus.com/inward/record.url?scp=84856351542&partnerID=8YFLogxK
U2 - 10.1117/12.899187
DO - 10.1117/12.899187
M3 - Conference contribution
AN - SCOPUS:84856351542
SN - 9780819488237
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - 43rd Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials
T2 - 43rd Annual Laser Damage Symposium - Laser-Induced Damage in Optical Materials: 2011
Y2 - 18 September 2010 through 21 September 2010
ER -