Details
| Original language | English |
|---|---|
| Title of host publication | Optical Interference Coatings, OIC 2022 |
| ISBN (electronic) | 9781957171043 |
| Publication status | Published - 2022 |
| Event | Optical Interference Coatings, OIC 2022 - Vancouver, Canada Duration: 19 Jun 2022 → 24 Jun 2022 |
Publication series
| Name | Optics InfoBase Conference Papers |
|---|---|
| ISSN (electronic) | 2162-2701 |
Abstract
Ta2O5 and SiO2 films coated by rotary atomic layer deposition were studied. Investigations proved low absorption 3.1 ppm, respectively 6.0 ppm as well as uniformity 1.55 % and 2.71 % for growth rates up to 0.18 nm/sec.
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Engineering(all)
- Mechanics of Materials
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Optical Interference Coatings, OIC 2022. 2022. (Optics InfoBase Conference Papers).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Enabling rotary Atomic Layer Deposition for optical applications
AU - Kochanneck, Leif
AU - Tewes, Andreas
AU - Hoffmann, Gerd Albert
AU - Niiranen, Kalle
AU - Rönn, John
AU - Sneck, Sami
AU - Wienke, Andreas
AU - Ristau, Detlev
N1 - Funding Information: This work was supported by the European Regional Development Fund ZW 2-80147672 and also by the German Federal Ministry of Education and Research in the research project INTEGRA 01QE2032B. The authors would like to thank the Deutsche Forschungsgemeinschaft (DFG, German Research Foundation) for funding this work under n the Cluster of Excellence PhoenixD (EXC 2122, Project ID 390833453).
PY - 2022
Y1 - 2022
N2 - Ta2O5 and SiO2 films coated by rotary atomic layer deposition were studied. Investigations proved low absorption 3.1 ppm, respectively 6.0 ppm as well as uniformity 1.55 % and 2.71 % for growth rates up to 0.18 nm/sec.
AB - Ta2O5 and SiO2 films coated by rotary atomic layer deposition were studied. Investigations proved low absorption 3.1 ppm, respectively 6.0 ppm as well as uniformity 1.55 % and 2.71 % for growth rates up to 0.18 nm/sec.
UR - http://www.scopus.com/inward/record.url?scp=85139140183&partnerID=8YFLogxK
U2 - 10.1364/OIC.2022.TC.1
DO - 10.1364/OIC.2022.TC.1
M3 - Conference contribution
AN - SCOPUS:85139140183
T3 - Optics InfoBase Conference Papers
BT - Optical Interference Coatings, OIC 2022
T2 - Optical Interference Coatings, OIC 2022
Y2 - 19 June 2022 through 24 June 2022
ER -