Details
| Translated title of the contribution | Electromechanical bending microactuator as optical shutter |
|---|---|
| Original language | German |
| Title of host publication | MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings |
| Publisher | VDE Verlag GmbH |
| Pages | 519-522 |
| Number of pages | 4 |
| ISBN (electronic) | 9783800744916 |
| Publication status | Published - 2017 |
| Event | MikroSystemTechnik Kongress 2017: MEMS, Mikroelektronik, Systeme - München, Germany Duration: 23 Oct 2017 → 25 Oct 2017 |
Publication series
| Name | MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings |
|---|
Abstract
In this work is presented the design, fabrication methods, and characterization of a thin film electromechanical optical shutter. The working stroke of the optical channel is provided by a multilayer film structure of a cantilever, whose profile is determined by the residual internal stresses of the films. In the process of design analysis were determined the parameters of the strained structural layers, the temperature dependence of the curvature, the undamped natural frequencies and the damping parameters of the film cantilever. The experimental results fit the theoretical data closely. The developed control circuit is designed to compensate for the induced dielectric polarization and prevents a rise of the control voltage as well as the sticking effect of the cantilever. The presented design allows the development of a simple and effective electromechanical optical shutter with a modulation aperture height larger than 1.4 mm.
ASJC Scopus subject areas
- Engineering(all)
- Electrical and Electronic Engineering
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Materials Science(all)
- Surfaces, Coatings and Films
- Physics and Astronomy(all)
- Condensed Matter Physics
- Physics and Astronomy(all)
- Atomic and Molecular Physics, and Optics
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MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, 2017. p. 519-522 (MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Elektromechanischer Mikro-Biegeaktor als optischer Shutter
AU - Pyatishev, E.
AU - Wurz, Marc
AU - Enns, Y.
AU - Glukhovskoy, Anatoly
AU - Fischer, Enno
AU - Odintsov, A.
AU - Kleimanov, R.
N1 - Publisher Copyright: © VDE VERLAG GMBH ∙ Berlin ∙ Offenbach Copyright: Copyright 2020 Elsevier B.V., All rights reserved.
PY - 2017
Y1 - 2017
N2 - In this work is presented the design, fabrication methods, and characterization of a thin film electromechanical optical shutter. The working stroke of the optical channel is provided by a multilayer film structure of a cantilever, whose profile is determined by the residual internal stresses of the films. In the process of design analysis were determined the parameters of the strained structural layers, the temperature dependence of the curvature, the undamped natural frequencies and the damping parameters of the film cantilever. The experimental results fit the theoretical data closely. The developed control circuit is designed to compensate for the induced dielectric polarization and prevents a rise of the control voltage as well as the sticking effect of the cantilever. The presented design allows the development of a simple and effective electromechanical optical shutter with a modulation aperture height larger than 1.4 mm.
AB - In this work is presented the design, fabrication methods, and characterization of a thin film electromechanical optical shutter. The working stroke of the optical channel is provided by a multilayer film structure of a cantilever, whose profile is determined by the residual internal stresses of the films. In the process of design analysis were determined the parameters of the strained structural layers, the temperature dependence of the curvature, the undamped natural frequencies and the damping parameters of the film cantilever. The experimental results fit the theoretical data closely. The developed control circuit is designed to compensate for the induced dielectric polarization and prevents a rise of the control voltage as well as the sticking effect of the cantilever. The presented design allows the development of a simple and effective electromechanical optical shutter with a modulation aperture height larger than 1.4 mm.
UR - http://www.scopus.com/inward/record.url?scp=85096802285&partnerID=8YFLogxK
M3 - Aufsatz in Konferenzband
AN - SCOPUS:85096802285
T3 - MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings
SP - 519
EP - 522
BT - MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings
PB - VDE Verlag GmbH
T2 - MikroSystemTechnik Kongress 2017: MEMS, Mikroelektronik, Systeme
Y2 - 23 October 2017 through 25 October 2017
ER -