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Electron-selective atomic-layer-deposited TiOx layers: Impact of post-deposition annealing and implementation into n -type silicon solar cells

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

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Research Organisations

External Research Organisations

  • Institute for Solar Energy Research (ISFH)

Details

Original languageEnglish
Title of host publicationSiliconPV 2018, the 8th International Conference on Crystalline Silicon Photovoltaics
EditorsRolf Brendel, Jef Poortmans, Arthur Weeber, Giso Hahn, Christophe Ballif, Stefan Glunz, Pierre-Jean Ribeyron
PublisherAmerican Institute of Physics Inc.
ISBN (print)9780735417151
Publication statusPublished - 10 Aug 2018
EventSiliconPV 2018: The 8th International Conference on Crystalline Silicon Photovoltaics - Lausanne, Switzerland
Duration: 19 Mar 201821 Mar 2018

Publication series

NameAIP Conference Proceedings
Volume1999
ISSN (Print)0094-243X
ISSN (electronic)1551-7616

Abstract

Atomic-layer-deposited titanium oxide (TiOx) is examined for the application as electron-selective full-area contact to n-type silicon solar cells. Although the surface passivation quality of TiOx-passivated n-type silicon wafers is quite poor directly after deposition of the TiOx, we demonstrate that annealing in ambient environment at only 250°C reduces the surface recombination velocity to values below 10 cm/s over the entire cell-relevant injection range. By combining lifetime measurements with X-ray diffraction (XRD) characterization we demonstrate that the degradation of the passivation by TiOx during annealing at increased temperature is due to the crystallization of the amorphous TiOx into the crystalline anatase phase. We implement our optimized ALD-TiOx layers as electron-selective full-area rear contacts into n-type silicon solar cells and reach efficiencies up to 20.3% after low-temperature annealing in our first batch. The surface recombination velocity Srear at the cell rear, as extracted from the measured spectral internal quantum efficiency, is (52±20) cm/s. Interestingly, the fabricated solar cells show a much better thermal stability compared to the lifetime test structures, which seems to be a fundamental difference. The main difference of the finished solar cells to our lifetime test structures is that the TiOx layer is fully covered with aluminum in the solar cells. This suggests an interaction of Al with the ultrathin TiOx layer, resulting in an improved thermal stability.

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Cite this

Electron-selective atomic-layer-deposited TiOx layers: Impact of post-deposition annealing and implementation into n -type silicon solar cells. / Titova, Valeriya; Startsev, Dimitrij; Schmidt, Jan.
SiliconPV 2018, the 8th International Conference on Crystalline Silicon Photovoltaics. ed. / Rolf Brendel; Jef Poortmans; Arthur Weeber; Giso Hahn; Christophe Ballif; Stefan Glunz; Pierre-Jean Ribeyron. American Institute of Physics Inc., 2018. 040022 (AIP Conference Proceedings; Vol. 1999).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Titova, V, Startsev, D & Schmidt, J 2018, Electron-selective atomic-layer-deposited TiOx layers: Impact of post-deposition annealing and implementation into n -type silicon solar cells. in R Brendel, J Poortmans, A Weeber, G Hahn, C Ballif, S Glunz & P-J Ribeyron (eds), SiliconPV 2018, the 8th International Conference on Crystalline Silicon Photovoltaics., 040022, AIP Conference Proceedings, vol. 1999, American Institute of Physics Inc., SiliconPV 2018: The 8th International Conference on Crystalline Silicon Photovoltaics, Lausanne, Switzerland, 19 Mar 2018. https://doi.org/10.1063/1.5049285
Titova, V., Startsev, D., & Schmidt, J. (2018). Electron-selective atomic-layer-deposited TiOx layers: Impact of post-deposition annealing and implementation into n -type silicon solar cells. In R. Brendel, J. Poortmans, A. Weeber, G. Hahn, C. Ballif, S. Glunz, & P.-J. Ribeyron (Eds.), SiliconPV 2018, the 8th International Conference on Crystalline Silicon Photovoltaics Article 040022 (AIP Conference Proceedings; Vol. 1999). American Institute of Physics Inc.. https://doi.org/10.1063/1.5049285
Titova V, Startsev D, Schmidt J. Electron-selective atomic-layer-deposited TiOx layers: Impact of post-deposition annealing and implementation into n -type silicon solar cells. In Brendel R, Poortmans J, Weeber A, Hahn G, Ballif C, Glunz S, Ribeyron PJ, editors, SiliconPV 2018, the 8th International Conference on Crystalline Silicon Photovoltaics. American Institute of Physics Inc. 2018. 040022. (AIP Conference Proceedings). doi: 10.1063/1.5049285
Titova, Valeriya ; Startsev, Dimitrij ; Schmidt, Jan. / Electron-selective atomic-layer-deposited TiOx layers : Impact of post-deposition annealing and implementation into n -type silicon solar cells. SiliconPV 2018, the 8th International Conference on Crystalline Silicon Photovoltaics. editor / Rolf Brendel ; Jef Poortmans ; Arthur Weeber ; Giso Hahn ; Christophe Ballif ; Stefan Glunz ; Pierre-Jean Ribeyron. American Institute of Physics Inc., 2018. (AIP Conference Proceedings).
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title = "Electron-selective atomic-layer-deposited TiOx layers: Impact of post-deposition annealing and implementation into n -type silicon solar cells",
abstract = "Atomic-layer-deposited titanium oxide (TiOx) is examined for the application as electron-selective full-area contact to n-type silicon solar cells. Although the surface passivation quality of TiOx-passivated n-type silicon wafers is quite poor directly after deposition of the TiOx, we demonstrate that annealing in ambient environment at only 250°C reduces the surface recombination velocity to values below 10 cm/s over the entire cell-relevant injection range. By combining lifetime measurements with X-ray diffraction (XRD) characterization we demonstrate that the degradation of the passivation by TiOx during annealing at increased temperature is due to the crystallization of the amorphous TiOx into the crystalline anatase phase. We implement our optimized ALD-TiOx layers as electron-selective full-area rear contacts into n-type silicon solar cells and reach efficiencies up to 20.3% after low-temperature annealing in our first batch. The surface recombination velocity Srear at the cell rear, as extracted from the measured spectral internal quantum efficiency, is (52±20) cm/s. Interestingly, the fabricated solar cells show a much better thermal stability compared to the lifetime test structures, which seems to be a fundamental difference. The main difference of the finished solar cells to our lifetime test structures is that the TiOx layer is fully covered with aluminum in the solar cells. This suggests an interaction of Al with the ultrathin TiOx layer, resulting in an improved thermal stability.",
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AU - Titova, Valeriya

AU - Startsev, Dimitrij

AU - Schmidt, Jan

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