Details
| Original language | English |
|---|---|
| Title of host publication | Lecture Notes in Production Engineering |
| Publisher | Springer Nature |
| Pages | 75-106 |
| Number of pages | 32 |
| ISBN (electronic) | 978-3-030-83765-5 |
| ISBN (print) | 978-3-030-83764-8 |
| Publication status | Published - 2022 |
Publication series
| Name | Lecture Notes in Production Engineering |
|---|---|
| Volume | Part F1161 |
| ISSN (Print) | 2194-0525 |
| ISSN (electronic) | 2194-0533 |
Abstract
While electromagnetic levitation systems are already available for ultra-precision applications, they are limited to inspection or measurement tasks and non-mechanical processing due to their severely limited stiffness. This contribution introduces a novel electromagnetic linear guide, which was specifically developed for use in ultra-precision high performance machining. The active guide system features a position noise and a mean positioning error in the low nanometer range. At the same time, it provides sufficient dynamic stiffness for diamond machining. Furthermore, the actuator and sensor capabilities of the electromagnetic linear guide are applied to increase motion dynamics while reducing dynamic disturbances in motion phases by up to 75 %. The capability of the new electromagnetic linear guide is finally shown for a reference diamond machining process.
ASJC Scopus subject areas
- Engineering(all)
- Industrial and Manufacturing Engineering
- Economics, Econometrics and Finance(all)
- Economics, Econometrics and Finance (miscellaneous)
- Engineering(all)
- Safety, Risk, Reliability and Quality
Cite this
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Lecture Notes in Production Engineering. Springer Nature, 2022. p. 75-106 (Lecture Notes in Production Engineering; Vol. Part F1161).
Research output: Chapter in book/report/conference proceeding › Contribution to book/anthology › Research › peer review
}
TY - CHAP
T1 - Electromagnetic Ultra-Precision Linear Guide
AU - Krüger, Rudolf
AU - Bergmann, Benjamin
AU - Denkena, Berend
PY - 2022
Y1 - 2022
N2 - While electromagnetic levitation systems are already available for ultra-precision applications, they are limited to inspection or measurement tasks and non-mechanical processing due to their severely limited stiffness. This contribution introduces a novel electromagnetic linear guide, which was specifically developed for use in ultra-precision high performance machining. The active guide system features a position noise and a mean positioning error in the low nanometer range. At the same time, it provides sufficient dynamic stiffness for diamond machining. Furthermore, the actuator and sensor capabilities of the electromagnetic linear guide are applied to increase motion dynamics while reducing dynamic disturbances in motion phases by up to 75 %. The capability of the new electromagnetic linear guide is finally shown for a reference diamond machining process.
AB - While electromagnetic levitation systems are already available for ultra-precision applications, they are limited to inspection or measurement tasks and non-mechanical processing due to their severely limited stiffness. This contribution introduces a novel electromagnetic linear guide, which was specifically developed for use in ultra-precision high performance machining. The active guide system features a position noise and a mean positioning error in the low nanometer range. At the same time, it provides sufficient dynamic stiffness for diamond machining. Furthermore, the actuator and sensor capabilities of the electromagnetic linear guide are applied to increase motion dynamics while reducing dynamic disturbances in motion phases by up to 75 %. The capability of the new electromagnetic linear guide is finally shown for a reference diamond machining process.
UR - http://www.scopus.com/inward/record.url?scp=85133269110&partnerID=8YFLogxK
U2 - 10.1007/978-3-030-83765-5_4
DO - 10.1007/978-3-030-83765-5_4
M3 - Contribution to book/anthology
AN - SCOPUS:85133269110
SN - 978-3-030-83764-8
T3 - Lecture Notes in Production Engineering
SP - 75
EP - 106
BT - Lecture Notes in Production Engineering
PB - Springer Nature
ER -