Details
| Original language | English |
|---|---|
| Title of host publication | International Conference and Exhibition on Integration Issues of Miniaturized Systems 2017, SSI 2017 |
| Pages | 50-56 |
| Number of pages | 7 |
| ISBN (electronic) | 9783957350572 |
| Publication status | Published - 2017 |
| Event | International Conference and Exhibition on Integration Issues of Miniaturized Systems 2017, SSI 2017 - Cork, Ireland Duration: 8 Mar 2017 → 9 Mar 2017 |
Publication series
| Name | International Conference and Exhibition on Integration Issues of Miniaturized Systems 2017, SSI 2017 |
|---|
ASJC Scopus subject areas
- Computer Science(all)
- Computer Science Applications
- Computer Science(all)
- Artificial Intelligence
- Computer Science(all)
- Computer Networks and Communications
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International Conference and Exhibition on Integration Issues of Miniaturized Systems 2017, SSI 2017. 2017. p. 50-56 (International Conference and Exhibition on Integration Issues of Miniaturized Systems 2017, SSI 2017).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Electrical feed through for tool integrated high temperature applications
AU - Dencker, Folke
AU - Kolodziejczyk, Felix
AU - Wurz, Marc Christopher
N1 - Funding Information: This work was funded by the German FOSTA and the German AIF at the Institute of Micro Production Technology, Centre for Production Technology, Leibniz Universität Hannover, Germany. The authors thank Christoph Huebsch (Institute for Material Sciences, Leibniz Universitaet Hannover) for the XRD measurements and Eike Fischer (Institute of Micro Production Technology, Leibniz Universitaet Hannover) for revision. Copyright: Copyright 2017 Elsevier B.V., All rights reserved.
PY - 2017
Y1 - 2017
UR - http://www.scopus.com/inward/record.url?scp=85032297710&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:85032297710
T3 - International Conference and Exhibition on Integration Issues of Miniaturized Systems 2017, SSI 2017
SP - 50
EP - 56
BT - International Conference and Exhibition on Integration Issues of Miniaturized Systems 2017, SSI 2017
T2 - International Conference and Exhibition on Integration Issues of Miniaturized Systems 2017, SSI 2017
Y2 - 8 March 2017 through 9 March 2017
ER -