Details
| Original language | English |
|---|---|
| Pages (from-to) | 1606-1610 |
| Number of pages | 5 |
| Journal | Microelectronics reliability |
| Volume | 53 |
| Issue number | 9-11 |
| Publication status | Published - Sept 2013 |
Abstract
Robust metallizations for harsh environment and high current applications in integrated circuits are required for automotive or industrial applications. To achieve a higher current capability so called "power metals" are used. The new concept of slotted geometries shows a better robustness towards degradation due to electromigration. This is a new design concept which is contrary to the conventional concept to use homogeneous filled metal tracks. A reliability investigation of octahedron-shaped slots in metal tracks was carried out by dynamic simulations. The determination thermal-electrical-mechanical behaviour was simulated with the finite element software ANSYS®.
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Atomic and Molecular Physics, and Optics
- Engineering(all)
- Safety, Risk, Reliability and Quality
- Physics and Astronomy(all)
- Condensed Matter Physics
- Materials Science(all)
- Surfaces, Coatings and Films
- Engineering(all)
- Electrical and Electronic Engineering
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In: Microelectronics reliability, Vol. 53, No. 9-11, 09.2013, p. 1606-1610.
Research output: Contribution to journal › Article › Research › peer review
}
TY - JOUR
T1 - Dynamic simulation of octahedron slotted metal structures
AU - Kludt, J.
AU - Weide-Zaage, K.
AU - Ackermann, M.
AU - Hein, V.
N1 - Funding Information: This collaboration was supported by RELY – Design for RELIABILITY (16M3091B). A part of the European CATRENE programme for research and development. Copyright: Copyright 2013 Elsevier B.V., All rights reserved.
PY - 2013/9
Y1 - 2013/9
N2 - Robust metallizations for harsh environment and high current applications in integrated circuits are required for automotive or industrial applications. To achieve a higher current capability so called "power metals" are used. The new concept of slotted geometries shows a better robustness towards degradation due to electromigration. This is a new design concept which is contrary to the conventional concept to use homogeneous filled metal tracks. A reliability investigation of octahedron-shaped slots in metal tracks was carried out by dynamic simulations. The determination thermal-electrical-mechanical behaviour was simulated with the finite element software ANSYS®.
AB - Robust metallizations for harsh environment and high current applications in integrated circuits are required for automotive or industrial applications. To achieve a higher current capability so called "power metals" are used. The new concept of slotted geometries shows a better robustness towards degradation due to electromigration. This is a new design concept which is contrary to the conventional concept to use homogeneous filled metal tracks. A reliability investigation of octahedron-shaped slots in metal tracks was carried out by dynamic simulations. The determination thermal-electrical-mechanical behaviour was simulated with the finite element software ANSYS®.
UR - http://www.scopus.com/inward/record.url?scp=84886925614&partnerID=8YFLogxK
U2 - 10.1016/j.microrel.2013.07.059
DO - 10.1016/j.microrel.2013.07.059
M3 - Article
AN - SCOPUS:84886925614
VL - 53
SP - 1606
EP - 1610
JO - Microelectronics reliability
JF - Microelectronics reliability
SN - 0026-2714
IS - 9-11
ER -