Details
| Original language | English |
|---|---|
| Title of host publication | Laser-Based Micro- and Nanoprocessing XIV |
| Editors | Udo Klotzbach, Akira Watanabe, Rainer Kling |
| Publisher | SPIE |
| ISBN (electronic) | 9781510632998 |
| Publication status | Published - 2020 |
| Externally published | Yes |
| Event | Laser-Based Micro- and Nanoprocessing XIV 2020 - San Francisco, United States Duration: 3 Feb 2020 → 6 Feb 2020 |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Volume | 11268 |
| ISSN (Print) | 0277-786X |
| ISSN (electronic) | 1996-756X |
Abstract
In micro-material processing with ultrashort laser pulses (USP), the surface quality during drilling and thin film ablation varies with the scanning speed and the pulse repetition rate. However, while high pulse repetition rates tend to be desirable, local heat accumulation caused by increasing pulse overlap is counterproductive. Thus, the scanning speed must be scaled with the pulse repetition rate, preferably by supplementing the already existing setup. In this work, we present a dynamic extension through the combination of an acousto-optical deflector (AOD) with a galvanometer scanner. This combines the best of two worlds: the dynamic beam deflection of the AOD and the large scanning field of the galvanometer scanner. The integrated AOD is able to deflect the laser beam pulse by pulse within its scanning field and to modulate the beam intensity simultaneously. The mechanical limitations and problems of the galvanometer scanner, such as vibrations and overshoots due to fast mirror rotations, can be specifically compensated by the high precision of the AOD. As a result, in addition to process time reduction, the surface and image quality improves significantly. In any case, the laser source needs synchronization with the AOD because the propagation of sound waves within the AOD crystal is slower than the laser pulse propagation through the medium. In the first step, a comparatively slow AOD based on tellurium dioxide with a transversal crystal alignment is used. The process time of a thin film ablation with 4 μJ at 1 MHz was reduced considerably by applying a USP laser system (Coherent Monaco).
Keywords
- Acousto-optical deflector, Laser beam scanner, Scanner combination
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Computer Science Applications
- Mathematics(all)
- Applied Mathematics
- Engineering(all)
- Electrical and Electronic Engineering
Cite this
- Standard
- Harvard
- Apa
- Vancouver
- BibTeX
- RIS
Laser-Based Micro- and Nanoprocessing XIV. ed. / Udo Klotzbach; Akira Watanabe; Rainer Kling. SPIE, 2020. 112681G (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 11268).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Divide-and-conquer laser beam deflection system
T2 - Laser-Based Micro- and Nanoprocessing XIV 2020
AU - Taschner, Patrick A.
AU - Düsing, Jan
AU - Koch, Jürgen
AU - Jäschke, Peter
AU - Kaierle, Stefan
AU - Overmeyer, Ludger
PY - 2020
Y1 - 2020
N2 - In micro-material processing with ultrashort laser pulses (USP), the surface quality during drilling and thin film ablation varies with the scanning speed and the pulse repetition rate. However, while high pulse repetition rates tend to be desirable, local heat accumulation caused by increasing pulse overlap is counterproductive. Thus, the scanning speed must be scaled with the pulse repetition rate, preferably by supplementing the already existing setup. In this work, we present a dynamic extension through the combination of an acousto-optical deflector (AOD) with a galvanometer scanner. This combines the best of two worlds: the dynamic beam deflection of the AOD and the large scanning field of the galvanometer scanner. The integrated AOD is able to deflect the laser beam pulse by pulse within its scanning field and to modulate the beam intensity simultaneously. The mechanical limitations and problems of the galvanometer scanner, such as vibrations and overshoots due to fast mirror rotations, can be specifically compensated by the high precision of the AOD. As a result, in addition to process time reduction, the surface and image quality improves significantly. In any case, the laser source needs synchronization with the AOD because the propagation of sound waves within the AOD crystal is slower than the laser pulse propagation through the medium. In the first step, a comparatively slow AOD based on tellurium dioxide with a transversal crystal alignment is used. The process time of a thin film ablation with 4 μJ at 1 MHz was reduced considerably by applying a USP laser system (Coherent Monaco).
AB - In micro-material processing with ultrashort laser pulses (USP), the surface quality during drilling and thin film ablation varies with the scanning speed and the pulse repetition rate. However, while high pulse repetition rates tend to be desirable, local heat accumulation caused by increasing pulse overlap is counterproductive. Thus, the scanning speed must be scaled with the pulse repetition rate, preferably by supplementing the already existing setup. In this work, we present a dynamic extension through the combination of an acousto-optical deflector (AOD) with a galvanometer scanner. This combines the best of two worlds: the dynamic beam deflection of the AOD and the large scanning field of the galvanometer scanner. The integrated AOD is able to deflect the laser beam pulse by pulse within its scanning field and to modulate the beam intensity simultaneously. The mechanical limitations and problems of the galvanometer scanner, such as vibrations and overshoots due to fast mirror rotations, can be specifically compensated by the high precision of the AOD. As a result, in addition to process time reduction, the surface and image quality improves significantly. In any case, the laser source needs synchronization with the AOD because the propagation of sound waves within the AOD crystal is slower than the laser pulse propagation through the medium. In the first step, a comparatively slow AOD based on tellurium dioxide with a transversal crystal alignment is used. The process time of a thin film ablation with 4 μJ at 1 MHz was reduced considerably by applying a USP laser system (Coherent Monaco).
KW - Acousto-optical deflector
KW - Laser beam scanner
KW - Scanner combination
UR - http://www.scopus.com/inward/record.url?scp=85086027265&partnerID=8YFLogxK
U2 - 10.1117/12.2546162
DO - 10.1117/12.2546162
M3 - Conference contribution
AN - SCOPUS:85086027265
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Laser-Based Micro- and Nanoprocessing XIV
A2 - Klotzbach, Udo
A2 - Watanabe, Akira
A2 - Kling, Rainer
PB - SPIE
Y2 - 3 February 2020 through 6 February 2020
ER -