Details
| Original language | English |
|---|---|
| Title of host publication | Optical Metrology in Production Engineering |
| Publisher | SPIE |
| Pages | 12-21 |
| Number of pages | 10 |
| Publication status | Published - 10 Sept 2004 |
| Event | Photonics Europe - Strasbourg, France Duration: 26 Apr 2004 → 30 Apr 2004 |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Volume | 5457 |
| ISSN (Print) | 0277-786X |
Abstract
A novel principle for absolute position measurements of rough surfaces is presented. A measurement object with a rough surface acts as an external reflector for an antireflection coated laser diode. Determining the longitudinal mode spacing yields the distance from the laser diode to the measurement object. Synchronous pumping of the laser diode results in locking of the modes of the built-up Fabry-Perot resonator. Due to resonance enhancement the mode locked external cavity laser sensor allows highly resolved displacement measurements of rough surfaces. The influence of the object as well as the active gain medium on the accuracy of the measurements is investigated by experiments and simulations.
Keywords
- Displacement measurement, External cavity laser, Interferometry, Mode locking, Rate equations, Semiconductor laser dynamics
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Computer Science Applications
- Mathematics(all)
- Applied Mathematics
- Engineering(all)
- Electrical and Electronic Engineering
Cite this
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Optical Metrology in Production Engineering. SPIE, 2004. p. 12-21 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 5457).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Displacement measurements of technical surfaces with a synchronously pumped external cavity diode laser
AU - Möbius, Jasper
AU - Czarske, Jürgen
AU - Moldenhauer, Karsten
AU - Ertmer, Wolfgang
AU - Müller-Wirts, Thomas
PY - 2004/9/10
Y1 - 2004/9/10
N2 - A novel principle for absolute position measurements of rough surfaces is presented. A measurement object with a rough surface acts as an external reflector for an antireflection coated laser diode. Determining the longitudinal mode spacing yields the distance from the laser diode to the measurement object. Synchronous pumping of the laser diode results in locking of the modes of the built-up Fabry-Perot resonator. Due to resonance enhancement the mode locked external cavity laser sensor allows highly resolved displacement measurements of rough surfaces. The influence of the object as well as the active gain medium on the accuracy of the measurements is investigated by experiments and simulations.
AB - A novel principle for absolute position measurements of rough surfaces is presented. A measurement object with a rough surface acts as an external reflector for an antireflection coated laser diode. Determining the longitudinal mode spacing yields the distance from the laser diode to the measurement object. Synchronous pumping of the laser diode results in locking of the modes of the built-up Fabry-Perot resonator. Due to resonance enhancement the mode locked external cavity laser sensor allows highly resolved displacement measurements of rough surfaces. The influence of the object as well as the active gain medium on the accuracy of the measurements is investigated by experiments and simulations.
KW - Displacement measurement
KW - External cavity laser
KW - Interferometry
KW - Mode locking
KW - Rate equations
KW - Semiconductor laser dynamics
UR - http://www.scopus.com/inward/record.url?scp=10044274172&partnerID=8YFLogxK
U2 - 10.1117/12.543886
DO - 10.1117/12.543886
M3 - Conference contribution
AN - SCOPUS:10044274172
T3 - Proceedings of SPIE - The International Society for Optical Engineering
SP - 12
EP - 21
BT - Optical Metrology in Production Engineering
PB - SPIE
T2 - Photonics Europe
Y2 - 26 April 2004 through 30 April 2004
ER -