Details
| Original language | English |
|---|---|
| Article number | 042004 |
| Journal | Journal of Laser Applications |
| Volume | 24 |
| Issue number | 4 |
| Publication status | Published - Sept 2012 |
Keywords
- fourier scatterometry, laser materials processing, nanostructures, Photosensitive materials, resolution, sensitivity analysis, sol-gel, subwavelength structures, two-photon polymerization, ultrafast technology, white light interference
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Atomic and Molecular Physics, and Optics
- Engineering(all)
- Biomedical Engineering
- Physics and Astronomy(all)
- Instrumentation
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In: Journal of Laser Applications, Vol. 24, No. 4, 042004, 09.2012.
Research output: Contribution to journal › Article › Research › peer review
}
TY - JOUR
T1 - Development of functional sub-100 nm structures with 3D two-photon polymerization technique and optical methods for characterization
AU - Paz, V. Ferreras
AU - Emons, M.
AU - Obata, K.
AU - Ovsianikov, A.
AU - Peterhänsel, S.
AU - Frenner, K.
AU - Reinhardt, C.
AU - Chichkov, Boris
AU - Morgner, Uwe
AU - Osten, W.
N1 - Funding information: This work was supported by the German DFG-funded priority program (No. SPP1327) on optically generated sub-100 nm structures for technical and biomedical applications, within the subproject development of functional sub-100 nm 3D two-photon polymerization technique and optical characterization methods.
PY - 2012/9
Y1 - 2012/9
KW - fourier scatterometry
KW - laser materials processing
KW - nanostructures
KW - Photosensitive materials
KW - resolution
KW - sensitivity analysis
KW - sol-gel
KW - subwavelength structures
KW - two-photon polymerization
KW - ultrafast technology
KW - white light interference
UR - http://www.scopus.com/inward/record.url?scp=84864120404&partnerID=8YFLogxK
U2 - 10.2351/1.4712151
DO - 10.2351/1.4712151
M3 - Article
AN - SCOPUS:84864120404
VL - 24
JO - Journal of Laser Applications
JF - Journal of Laser Applications
SN - 1042-346X
IS - 4
M1 - 042004
ER -