Details
| Original language | English |
|---|---|
| Article number | 5764524 |
| Pages (from-to) | 1409-1417 |
| Number of pages | 9 |
| Journal | IEEE Transactions on Industrial Electronics |
| Volume | 59 |
| Issue number | 3 |
| Publication status | Published - 5 May 2011 |
Abstract
Electromagnetic microactuators discussed in this paper have been the topic of research during the last decade. Their fabrication is based on batch processes like photolithography and etching of copper and iron, which is deposited on substrates. Resulting from these microfabrication techniques and the small size of motors, the drive system designer faces a very different task when compared to conventional drive systems. Those differences have to be considered in the electromagnetic design of the microactuator itself, as well as in the power supply and the control of the drive. This paper presents an overview of design options for these components of a miniaturized drive system and discusses their advantages and disadvantages from a system point of view.
Keywords
- Microactuators, micromotors, optimal position control, switched-capacitor (SC) converter
ASJC Scopus subject areas
- Engineering(all)
- Control and Systems Engineering
- Engineering(all)
- Electrical and Electronic Engineering
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In: IEEE Transactions on Industrial Electronics, Vol. 59, No. 3, 5764524, 05.05.2011, p. 1409-1417.
Research output: Contribution to journal › Article › Research › peer review
}
TY - JOUR
T1 - Development of drive systems based on electromagnetic microactuators
AU - Ganesan, Vijay
AU - Wiedmann, Karsten
AU - Janssen, Gerd
AU - Ponick, Bernd
AU - Mertens, Axel
N1 - Funding Information: Manuscript received July 10, 2010; revised October 25, 2010 and March 18, 2011; accepted April 20, 2011. Date of publication May 5, 2011; date of current version October 25, 2011. This work was supported by the German Research Foundation (DFG) as part of their support for the Collaborative Research Center “Design and Manufacturing of Active Microsystems.” V. Ganesan is with Siemens AG, 90475 Nürnberg, Germany (e-mail: vijay. ganesan@siemens.com). Copyright: Copyright 2011 Elsevier B.V., All rights reserved.
PY - 2011/5/5
Y1 - 2011/5/5
N2 - Electromagnetic microactuators discussed in this paper have been the topic of research during the last decade. Their fabrication is based on batch processes like photolithography and etching of copper and iron, which is deposited on substrates. Resulting from these microfabrication techniques and the small size of motors, the drive system designer faces a very different task when compared to conventional drive systems. Those differences have to be considered in the electromagnetic design of the microactuator itself, as well as in the power supply and the control of the drive. This paper presents an overview of design options for these components of a miniaturized drive system and discusses their advantages and disadvantages from a system point of view.
AB - Electromagnetic microactuators discussed in this paper have been the topic of research during the last decade. Their fabrication is based on batch processes like photolithography and etching of copper and iron, which is deposited on substrates. Resulting from these microfabrication techniques and the small size of motors, the drive system designer faces a very different task when compared to conventional drive systems. Those differences have to be considered in the electromagnetic design of the microactuator itself, as well as in the power supply and the control of the drive. This paper presents an overview of design options for these components of a miniaturized drive system and discusses their advantages and disadvantages from a system point of view.
KW - Microactuators
KW - micromotors
KW - optimal position control
KW - switched-capacitor (SC) converter
UR - http://www.scopus.com/inward/record.url?scp=80155201431&partnerID=8YFLogxK
U2 - 10.1109/TIE.2011.2151815
DO - 10.1109/TIE.2011.2151815
M3 - Article
AN - SCOPUS:80155201431
VL - 59
SP - 1409
EP - 1417
JO - IEEE Transactions on Industrial Electronics
JF - IEEE Transactions on Industrial Electronics
SN - 0278-0046
IS - 3
M1 - 5764524
ER -