Details
| Original language | English |
|---|---|
| Title of host publication | Optical Metrology and Inspection for Industrial Applications IV |
| Editors | Toru Yoshizawa, Sen Han, Song Zhang |
| Publisher | SPIE |
| ISBN (electronic) | 9781510604650 |
| Publication status | Published - 24 Nov 2016 |
| Event | Conference on Optical Metrology and Inspection for Industrial Applications IV - Beijing, China Duration: 12 Oct 2016 → 14 Oct 2016 |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Volume | 10023 |
| ISSN (Print) | 0277-786X |
| ISSN (electronic) | 1996-756X |
Abstract
Common 2D laser line triangulation sensors allow a 2D profile measurement in a single line. To scan samples with great curved surfaces like edges, a single laser line triangulation sensor is insufficient. To measure the entire form of such an edge, it normally requires either multiple measurements of one single sensor or a multi sensor system. For this reason, we developed an edge measurement sensor based on an in-house designed polyview optics and the well-known laser triangulation principle. The new developed edge measurement sensor is capable of measuring the object over a 180 field of view (FOV). The configuration, the calibration process and the measurement results of this edge sensor will be discussed in this paper.
Keywords
- 3D measurement, Optical systems for inspection and measurements, System calibration
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Computer Science Applications
- Mathematics(all)
- Applied Mathematics
- Engineering(all)
- Electrical and Electronic Engineering
Cite this
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- Apa
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- BibTeX
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Optical Metrology and Inspection for Industrial Applications IV. ed. / Toru Yoshizawa; Sen Han; Song Zhang. SPIE, 2016. 100231E (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 10023).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Development of an edge sensor based on polyview optics and laser triangulation principle
AU - Li, Yinan
AU - Bossmeyer, Hagen
AU - Kästner, Markus
AU - Reithmeier, Eduard
PY - 2016/11/24
Y1 - 2016/11/24
N2 - Common 2D laser line triangulation sensors allow a 2D profile measurement in a single line. To scan samples with great curved surfaces like edges, a single laser line triangulation sensor is insufficient. To measure the entire form of such an edge, it normally requires either multiple measurements of one single sensor or a multi sensor system. For this reason, we developed an edge measurement sensor based on an in-house designed polyview optics and the well-known laser triangulation principle. The new developed edge measurement sensor is capable of measuring the object over a 180 field of view (FOV). The configuration, the calibration process and the measurement results of this edge sensor will be discussed in this paper.
AB - Common 2D laser line triangulation sensors allow a 2D profile measurement in a single line. To scan samples with great curved surfaces like edges, a single laser line triangulation sensor is insufficient. To measure the entire form of such an edge, it normally requires either multiple measurements of one single sensor or a multi sensor system. For this reason, we developed an edge measurement sensor based on an in-house designed polyview optics and the well-known laser triangulation principle. The new developed edge measurement sensor is capable of measuring the object over a 180 field of view (FOV). The configuration, the calibration process and the measurement results of this edge sensor will be discussed in this paper.
KW - 3D measurement
KW - Optical systems for inspection and measurements
KW - System calibration
UR - http://www.scopus.com/inward/record.url?scp=85011419289&partnerID=8YFLogxK
U2 - 10.1117/12.2247007
DO - 10.1117/12.2247007
M3 - Conference contribution
AN - SCOPUS:85011419289
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Optical Metrology and Inspection for Industrial Applications IV
A2 - Yoshizawa, Toru
A2 - Han, Sen
A2 - Zhang, Song
PB - SPIE
T2 - Conference on Optical Metrology and Inspection for Industrial Applications IV
Y2 - 12 October 2016 through 14 October 2016
ER -