Details
| Original language | English |
|---|---|
| Pages (from-to) | 213-218 |
| Number of pages | 6 |
| Journal | Production Engineering |
| Volume | 6 |
| Issue number | 2 |
| Publication status | Published - 17 Jan 2012 |
Abstract
This paper presents the development of a micro-positioning system for the increase of operation accuracy of machine tools. A highly dynamic piezo-actuated micropump coupled with a hydraulic cylinder transforms small strokes of the piezoelectric actuator into a continuous piston movement. Fast-switching active valves direct the volume flow. Crucial for the functionality of the pump module is the sealing function of the membrane to isolate the piezoelectric actuator unit against high pressure fluid. Therefore, the requirements for foil membrane selection are investigated by means of a developed test bench. It is demonstrated that a successful test of foil membrane materials provides a closer insight into the entire valve characteristics.
Keywords
- Foil membrane test bench, Micro-positioning system, Piezoelectric actuator
ASJC Scopus subject areas
- Engineering(all)
- Mechanical Engineering
- Engineering(all)
- Industrial and Manufacturing Engineering
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In: Production Engineering, Vol. 6, No. 2, 17.01.2012, p. 213-218.
Research output: Contribution to journal › Article › Research › peer review
}
TY - JOUR
T1 - Development of an advanced micro-positioning system for increasing operation accuracy
T2 - Consideration of high pressure sealing
AU - Pluemer, Sabrina
AU - Voges-Schwieger, Kathrin
AU - Denkena, Berend
AU - Behrens, Bernd Arno
N1 - Funding information: Acknowledgments The authors thank the German Research Foundation (DFG) for funding this research concerning a piezo-hydraulic micro-positioning system for high loads (DE 447/25).
PY - 2012/1/17
Y1 - 2012/1/17
N2 - This paper presents the development of a micro-positioning system for the increase of operation accuracy of machine tools. A highly dynamic piezo-actuated micropump coupled with a hydraulic cylinder transforms small strokes of the piezoelectric actuator into a continuous piston movement. Fast-switching active valves direct the volume flow. Crucial for the functionality of the pump module is the sealing function of the membrane to isolate the piezoelectric actuator unit against high pressure fluid. Therefore, the requirements for foil membrane selection are investigated by means of a developed test bench. It is demonstrated that a successful test of foil membrane materials provides a closer insight into the entire valve characteristics.
AB - This paper presents the development of a micro-positioning system for the increase of operation accuracy of machine tools. A highly dynamic piezo-actuated micropump coupled with a hydraulic cylinder transforms small strokes of the piezoelectric actuator into a continuous piston movement. Fast-switching active valves direct the volume flow. Crucial for the functionality of the pump module is the sealing function of the membrane to isolate the piezoelectric actuator unit against high pressure fluid. Therefore, the requirements for foil membrane selection are investigated by means of a developed test bench. It is demonstrated that a successful test of foil membrane materials provides a closer insight into the entire valve characteristics.
KW - Foil membrane test bench
KW - Micro-positioning system
KW - Piezoelectric actuator
UR - http://www.scopus.com/inward/record.url?scp=84859157952&partnerID=8YFLogxK
U2 - 10.1007/s11740-012-0361-2
DO - 10.1007/s11740-012-0361-2
M3 - Article
AN - SCOPUS:84859157952
VL - 6
SP - 213
EP - 218
JO - Production Engineering
JF - Production Engineering
SN - 0944-6524
IS - 2
ER -