Details
| Original language | English |
|---|---|
| Title of host publication | Optical Sensing and Detection III |
| Publisher | SPIE |
| Number of pages | 8 |
| ISBN (print) | 9781628410891 |
| Publication status | Published - 15 May 2014 |
| Event | Optical Sensing and Detection III - Brussels, Belgium Duration: 14 Apr 2014 → 17 Apr 2014 |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Volume | 9141 |
| ISSN (Print) | 0277-786X |
| ISSN (electronic) | 1996-756X |
Abstract
Microscopic imaging techniques are usually applied for the inspection of microstructured surfaces. These techniques require clean measurement conditions. Soilings, e.g. dust or splashing liquids, can disturb the measurement process or even damage instruments. Since these soilings occur in the majority of manufacturing processes, microscopic inspection usually must be carried out in a separate laboratory. We present a measurement system which allows for a microscopic inspection and a 3D reconstruction of microstructured surfaces in harsh industrial conditions. The measurement system also enables precise positioning, e.g. of a grinding wheel, with an accuracy of 5 μm. The main component of the measurement system is a CCD camera with a high-magnification telecentric lens. By means of this camera it is even possible to measure structures with dimensions in the range of 30 to 50 μm. The camera and the lens are integrated into a waterproof and dustproof enclosure. The inspection window of the enclosure has an air curtain which serves as a splash guard. The workpiece illumination is crucial in order to obtain good measurement results. The measuring system includes high-power LEDs which are integrated in a waterproof enclosure. The measurement system also includes a laser with a specially designed lens system to form an extremely narrow light section on the workpiece surface. It is possible to obtain a line width of 25 μm. This line and the camera with the high-magnification telecentric lens are used to perform a laser triangulation of the microstructured surface. This paper describes the system as well as the development and evaluation of the software for the automatic positioning of the workpiece and the automatic three-dimensional surface analysis.
Keywords
- Industrial inspection, Machine vision, Microstructured surfaces, Optical Inspection, Process monitoring and control
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Computer Science Applications
- Mathematics(all)
- Applied Mathematics
- Engineering(all)
- Electrical and Electronic Engineering
Cite this
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Optical Sensing and Detection III. SPIE, 2014. 91411F (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9141).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Development of a measurement system for the online inspection of microstructured surfaces in harsh industrial conditions
AU - Mueller, Thomas
AU - Langmann, Benjamin
AU - Reithmeier, Eduard
PY - 2014/5/15
Y1 - 2014/5/15
N2 - Microscopic imaging techniques are usually applied for the inspection of microstructured surfaces. These techniques require clean measurement conditions. Soilings, e.g. dust or splashing liquids, can disturb the measurement process or even damage instruments. Since these soilings occur in the majority of manufacturing processes, microscopic inspection usually must be carried out in a separate laboratory. We present a measurement system which allows for a microscopic inspection and a 3D reconstruction of microstructured surfaces in harsh industrial conditions. The measurement system also enables precise positioning, e.g. of a grinding wheel, with an accuracy of 5 μm. The main component of the measurement system is a CCD camera with a high-magnification telecentric lens. By means of this camera it is even possible to measure structures with dimensions in the range of 30 to 50 μm. The camera and the lens are integrated into a waterproof and dustproof enclosure. The inspection window of the enclosure has an air curtain which serves as a splash guard. The workpiece illumination is crucial in order to obtain good measurement results. The measuring system includes high-power LEDs which are integrated in a waterproof enclosure. The measurement system also includes a laser with a specially designed lens system to form an extremely narrow light section on the workpiece surface. It is possible to obtain a line width of 25 μm. This line and the camera with the high-magnification telecentric lens are used to perform a laser triangulation of the microstructured surface. This paper describes the system as well as the development and evaluation of the software for the automatic positioning of the workpiece and the automatic three-dimensional surface analysis.
AB - Microscopic imaging techniques are usually applied for the inspection of microstructured surfaces. These techniques require clean measurement conditions. Soilings, e.g. dust or splashing liquids, can disturb the measurement process or even damage instruments. Since these soilings occur in the majority of manufacturing processes, microscopic inspection usually must be carried out in a separate laboratory. We present a measurement system which allows for a microscopic inspection and a 3D reconstruction of microstructured surfaces in harsh industrial conditions. The measurement system also enables precise positioning, e.g. of a grinding wheel, with an accuracy of 5 μm. The main component of the measurement system is a CCD camera with a high-magnification telecentric lens. By means of this camera it is even possible to measure structures with dimensions in the range of 30 to 50 μm. The camera and the lens are integrated into a waterproof and dustproof enclosure. The inspection window of the enclosure has an air curtain which serves as a splash guard. The workpiece illumination is crucial in order to obtain good measurement results. The measuring system includes high-power LEDs which are integrated in a waterproof enclosure. The measurement system also includes a laser with a specially designed lens system to form an extremely narrow light section on the workpiece surface. It is possible to obtain a line width of 25 μm. This line and the camera with the high-magnification telecentric lens are used to perform a laser triangulation of the microstructured surface. This paper describes the system as well as the development and evaluation of the software for the automatic positioning of the workpiece and the automatic three-dimensional surface analysis.
KW - Industrial inspection
KW - Machine vision
KW - Microstructured surfaces
KW - Optical Inspection
KW - Process monitoring and control
UR - http://www.scopus.com/inward/record.url?scp=84905674519&partnerID=8YFLogxK
U2 - 10.1117/12.2052080
DO - 10.1117/12.2052080
M3 - Conference contribution
AN - SCOPUS:84905674519
SN - 9781628410891
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Optical Sensing and Detection III
PB - SPIE
T2 - Optical Sensing and Detection III
Y2 - 14 April 2014 through 17 April 2014
ER -