Details
| Original language | English |
|---|---|
| Pages (from-to) | 27-34 |
| Journal | Procedia Technology |
| Volume | 26 |
| Publication status | Published - 1 Oct 2016 |
Keywords
- humidity sensor, direct deposition, zinc oxide, ZnO, Collaborative Research Centre 653
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Development of a Humidity Sensor Element Based on Sputter-deposited thin ZnO-Layers. / Klaas, Daniel; Rein, M.; Wurz, Marc et al.
In: Procedia Technology, Vol. 26, 01.10.2016, p. 27-34.
In: Procedia Technology, Vol. 26, 01.10.2016, p. 27-34.
Research output: Contribution to journal › Conference article › Research
Klaas, D, Rein, M, Wurz, M & Rissing, L 2016, 'Development of a Humidity Sensor Element Based on Sputter-deposited thin ZnO-Layers', Procedia Technology, vol. 26, pp. 27-34. https://doi.org/10.1016/j.protcy.2016.08.005
Klaas, D., Rein, M., Wurz, M., & Rissing, L. (2016). Development of a Humidity Sensor Element Based on Sputter-deposited thin ZnO-Layers. Procedia Technology, 26, 27-34. https://doi.org/10.1016/j.protcy.2016.08.005
Klaas D, Rein M, Wurz M, Rissing L. Development of a Humidity Sensor Element Based on Sputter-deposited thin ZnO-Layers. Procedia Technology. 2016 Oct 1;26:27-34. doi: 10.1016/j.protcy.2016.08.005
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title = "Development of a Humidity Sensor Element Based on Sputter-deposited thin ZnO-Layers",
keywords = "humidity sensor, direct deposition, zinc oxide, ZnO, Collaborative Research Centre 653",
author = "Daniel Klaas and M. Rein and Marc Wurz and Lutz Rissing",
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month = oct,
day = "1",
doi = "10.1016/j.protcy.2016.08.005",
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Download
TY - JOUR
T1 - Development of a Humidity Sensor Element Based on Sputter-deposited thin ZnO-Layers
AU - Klaas, Daniel
AU - Rein, M.
AU - Wurz, Marc
AU - Rissing, Lutz
PY - 2016/10/1
Y1 - 2016/10/1
KW - humidity sensor
KW - direct deposition
KW - zinc oxide
KW - ZnO
KW - Collaborative Research Centre 653
U2 - 10.1016/j.protcy.2016.08.005
DO - 10.1016/j.protcy.2016.08.005
M3 - Conference article
VL - 26
SP - 27
EP - 34
JO - Procedia Technology
JF - Procedia Technology
SN - 2212-0173
ER -