Details
| Original language | English |
|---|---|
| Article number | 3294 |
| Pages (from-to) | 1-15 |
| Number of pages | 15 |
| Journal | Sensors (Switzerland) |
| Volume | 20 |
| Issue number | 11 |
| Publication status | Published - 10 Jun 2020 |
Abstract
New sensor and sensor manufacturing technologies are identified as a key factor for a successful digitalisation and are therefore economically important for manufacturers and industry. To address various requirements, a new sputter coating system has been invented at the Institute of Micro Production Technology. It enables the deposition of sensor systems directly onto technical surfaces. Compared to commercially available systems, it has no spatial limitations concerning the maximum coatable component size. Moreover, it enables a simultaneous structuring of deposited layers. Within this paper, characterisation techniques, results and challenges concerning directly deposited thin film strain gauges with the new sputter coating system are presented. Constantan (CuNiMn 54/45/1) and NiCr 80/20 are used as sensor materials. The initial resistance, temperature coefficient of resistance and gauge factor/k-factor of quarter-bridge strain gauges are characterised. The influence of a protective layer on sensor behaviour and layer adhesion is investigated as well. Moreover, the temperature compensation quality of directly deposited half-bridge strain gauges is evaluated, optimised with an external trimming technology and benchmarked against commercial strain gauges. Finally, the suitability for high-temperature strain measurement is investigated. Results show a maximum operation temperature of at least 400◦ C, which is above the current state-of-the-art of commercial foil-based metal strain gauges.
Keywords
- Direct deposition, Gauge factor, Half-bridge, High-temperature, K-factor, Micro strain gauges, Quarter-bridge, Sensors, Sputtering, Temperature coefficient of resistance, Trimming
ASJC Scopus subject areas
- Chemistry(all)
- Analytical Chemistry
- Biochemistry, Genetics and Molecular Biology(all)
- Biochemistry
- Physics and Astronomy(all)
- Atomic and Molecular Physics, and Optics
- Physics and Astronomy(all)
- Instrumentation
- Engineering(all)
- Electrical and Electronic Engineering
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In: Sensors (Switzerland), Vol. 20, No. 11, 3294, 10.06.2020, p. 1-15.
Research output: Contribution to journal › Article › Research › peer review
}
TY - JOUR
T1 - Development, characterisation and high-temperature suitability of thin-film strain gauges directly deposited with a new sputter coating system
AU - Klaas, Daniel
AU - Ottermann, Rico
AU - Dencker, Folke
AU - Wurz, Marc Christopher
N1 - The development of the invented sputter coating system and parts of this work were funded by the German Research Foundation within the Collaborative Research Centre 653 “Gentelligent Components in their Lifecycle” within the sub-project S1 “Modular, Multifunctional Micro Sensors” at the Institute of Micro Production Technology, Centre for Production Technology, Leibniz Universität Hannover, Germany. The publication of this article was funded by the Open Access Fund of the Leibniz Universität Hannover.
PY - 2020/6/10
Y1 - 2020/6/10
N2 - New sensor and sensor manufacturing technologies are identified as a key factor for a successful digitalisation and are therefore economically important for manufacturers and industry. To address various requirements, a new sputter coating system has been invented at the Institute of Micro Production Technology. It enables the deposition of sensor systems directly onto technical surfaces. Compared to commercially available systems, it has no spatial limitations concerning the maximum coatable component size. Moreover, it enables a simultaneous structuring of deposited layers. Within this paper, characterisation techniques, results and challenges concerning directly deposited thin film strain gauges with the new sputter coating system are presented. Constantan (CuNiMn 54/45/1) and NiCr 80/20 are used as sensor materials. The initial resistance, temperature coefficient of resistance and gauge factor/k-factor of quarter-bridge strain gauges are characterised. The influence of a protective layer on sensor behaviour and layer adhesion is investigated as well. Moreover, the temperature compensation quality of directly deposited half-bridge strain gauges is evaluated, optimised with an external trimming technology and benchmarked against commercial strain gauges. Finally, the suitability for high-temperature strain measurement is investigated. Results show a maximum operation temperature of at least 400◦ C, which is above the current state-of-the-art of commercial foil-based metal strain gauges.
AB - New sensor and sensor manufacturing technologies are identified as a key factor for a successful digitalisation and are therefore economically important for manufacturers and industry. To address various requirements, a new sputter coating system has been invented at the Institute of Micro Production Technology. It enables the deposition of sensor systems directly onto technical surfaces. Compared to commercially available systems, it has no spatial limitations concerning the maximum coatable component size. Moreover, it enables a simultaneous structuring of deposited layers. Within this paper, characterisation techniques, results and challenges concerning directly deposited thin film strain gauges with the new sputter coating system are presented. Constantan (CuNiMn 54/45/1) and NiCr 80/20 are used as sensor materials. The initial resistance, temperature coefficient of resistance and gauge factor/k-factor of quarter-bridge strain gauges are characterised. The influence of a protective layer on sensor behaviour and layer adhesion is investigated as well. Moreover, the temperature compensation quality of directly deposited half-bridge strain gauges is evaluated, optimised with an external trimming technology and benchmarked against commercial strain gauges. Finally, the suitability for high-temperature strain measurement is investigated. Results show a maximum operation temperature of at least 400◦ C, which is above the current state-of-the-art of commercial foil-based metal strain gauges.
KW - Direct deposition
KW - Gauge factor
KW - Half-bridge
KW - High-temperature
KW - K-factor
KW - Micro strain gauges
KW - Quarter-bridge
KW - Sensors
KW - Sputtering
KW - Temperature coefficient of resistance
KW - Trimming
UR - http://www.scopus.com/inward/record.url?scp=85086414691&partnerID=8YFLogxK
U2 - 10.3390/s20113294
DO - 10.3390/s20113294
M3 - Article
C2 - 32531874
AN - SCOPUS:85086414691
VL - 20
SP - 1
EP - 15
JO - Sensors (Switzerland)
JF - Sensors (Switzerland)
SN - 1424-8220
IS - 11
M1 - 3294
ER -