Details
| Original language | English |
|---|---|
| Pages (from-to) | 2716-2718 |
| Number of pages | 3 |
| Journal | IEEE Transactions on Magnetics |
| Volume | 43 |
| Issue number | 6 |
| Early online date | 21 May 2007 |
| Publication status | Published - Jun 2007 |
Abstract
An active magnetic levitation system based on repulsive magnetic forces was developed as a guide for a linear hybrid microstep motor. With this levitation system, the vertical force, which is typically an order of magnitude greater than the driving force, can be compensated. A capacitive measurement system provides measurement data to maintaining a constant air gap. This paper presents the design, fabrication, and first measurement results of the magnetic guide and the air gap measurement sensor.
Keywords
- Electromagnetic drive, Linear micromotor, Magnetic levitation, Microassembly
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Engineering(all)
- Electrical and Electronic Engineering
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In: IEEE Transactions on Magnetics, Vol. 43, No. 6, 06.2007, p. 2716-2718.
Research output: Contribution to journal › Article › Research › peer review
}
TY - JOUR
T1 - Development and Evaluation of an Active Magnetic Guide for Microsystems With an Integrated Air Gap Measurement System
AU - Ruffert, Christine
AU - Li, Jixiang
AU - Denkena, Berend
AU - Gatzen, Hans H.
N1 - Funding Information: This work was supported in part by the German Research Foundation (DFG) within their support for the Collaborative Research Center 516 “Design and Fabrication of Active Microsystems.” The authors would like to thank R. Gehrking, IAL, Leibniz Universität Hannover, for executing the FEM simulations for the magnetic guide, and S. Bütefisch, PTB, Braunschweig, Germany, for his support during the force and air gap measurements.
PY - 2007/6
Y1 - 2007/6
N2 - An active magnetic levitation system based on repulsive magnetic forces was developed as a guide for a linear hybrid microstep motor. With this levitation system, the vertical force, which is typically an order of magnitude greater than the driving force, can be compensated. A capacitive measurement system provides measurement data to maintaining a constant air gap. This paper presents the design, fabrication, and first measurement results of the magnetic guide and the air gap measurement sensor.
AB - An active magnetic levitation system based on repulsive magnetic forces was developed as a guide for a linear hybrid microstep motor. With this levitation system, the vertical force, which is typically an order of magnitude greater than the driving force, can be compensated. A capacitive measurement system provides measurement data to maintaining a constant air gap. This paper presents the design, fabrication, and first measurement results of the magnetic guide and the air gap measurement sensor.
KW - Electromagnetic drive
KW - Linear micromotor
KW - Magnetic levitation
KW - Microassembly
UR - http://www.scopus.com/inward/record.url?scp=34249055554&partnerID=8YFLogxK
U2 - 10.1109/TMAG.2007.893779
DO - 10.1109/TMAG.2007.893779
M3 - Article
AN - SCOPUS:34249055554
VL - 43
SP - 2716
EP - 2718
JO - IEEE Transactions on Magnetics
JF - IEEE Transactions on Magnetics
SN - 0018-9464
IS - 6
ER -