Details
| Original language | English |
|---|---|
| Article number | 6172423 |
| Pages (from-to) | 1481-1484 |
| Number of pages | 4 |
| Journal | IEEE transactions on magnetics |
| Volume | 48 |
| Issue number | 4 |
| Publication status | Published - Apr 2012 |
Abstract
A 3-D magnetic field sensor based on the giant magnetoresistive (GMR) spin valve (SV) was designed for improving the energy efficiency in intelligent automating devices. Generally GMR SV sensors are selective only in the plane of the substrate due to fabrication restraints. For this application, a sensor with ultra-thin dimensions is required for the system integration. The approach using micro-assembly for the accomplishment of 3-D field detection is not possible. Therefore, the integration of soft magnetic materials is essential to deflect the magnetic flux for the detection of a magnetic field in the direction perpendicular to the substrate. In this paper the design of 3-D flux guides was presented. Finite element method (FEM) simulations were used to optimize the flux guide design. NiFe, with its high permeability μ, low coercivity H c and relatively high saturation flux density Bs , was regarded as the suitable material for this application. Electroplating and patterning by means of photolithography promises to be the appropriate process to integrate this material after the deposition of the GMR multilayer. To characterize the magnetic properties measurements with a Vibrating Sample Magnetometer (VSM) as well as a hysteresisgraph were carried out.
Keywords
- Giant magnetoresistive sensor, magnetic flux guide, soft magnetic materials, spin valve
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Engineering(all)
- Electrical and Electronic Engineering
Sustainable Development Goals
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In: IEEE transactions on magnetics, Vol. 48, No. 4, 6172423, 04.2012, p. 1481-1484.
Research output: Contribution to journal › Article › Research › peer review
}
TY - JOUR
T1 - Designs and characterizations of soft magnetic flux guides in a 3-D magnetic field sensor
AU - Chen, Jue
AU - Wurz, Marc C.
AU - Belski, Alexander
AU - Rissing, Lutz
N1 - Funding Information: This work was sponsored by the BMBF (Federal Ministry of Education and Research), Germany, within their support for “Integration of Ultra-Thin Magnet Field Sensors in Intelligent Automation Components”.
PY - 2012/4
Y1 - 2012/4
N2 - A 3-D magnetic field sensor based on the giant magnetoresistive (GMR) spin valve (SV) was designed for improving the energy efficiency in intelligent automating devices. Generally GMR SV sensors are selective only in the plane of the substrate due to fabrication restraints. For this application, a sensor with ultra-thin dimensions is required for the system integration. The approach using micro-assembly for the accomplishment of 3-D field detection is not possible. Therefore, the integration of soft magnetic materials is essential to deflect the magnetic flux for the detection of a magnetic field in the direction perpendicular to the substrate. In this paper the design of 3-D flux guides was presented. Finite element method (FEM) simulations were used to optimize the flux guide design. NiFe, with its high permeability μ, low coercivity H c and relatively high saturation flux density Bs , was regarded as the suitable material for this application. Electroplating and patterning by means of photolithography promises to be the appropriate process to integrate this material after the deposition of the GMR multilayer. To characterize the magnetic properties measurements with a Vibrating Sample Magnetometer (VSM) as well as a hysteresisgraph were carried out.
AB - A 3-D magnetic field sensor based on the giant magnetoresistive (GMR) spin valve (SV) was designed for improving the energy efficiency in intelligent automating devices. Generally GMR SV sensors are selective only in the plane of the substrate due to fabrication restraints. For this application, a sensor with ultra-thin dimensions is required for the system integration. The approach using micro-assembly for the accomplishment of 3-D field detection is not possible. Therefore, the integration of soft magnetic materials is essential to deflect the magnetic flux for the detection of a magnetic field in the direction perpendicular to the substrate. In this paper the design of 3-D flux guides was presented. Finite element method (FEM) simulations were used to optimize the flux guide design. NiFe, with its high permeability μ, low coercivity H c and relatively high saturation flux density Bs , was regarded as the suitable material for this application. Electroplating and patterning by means of photolithography promises to be the appropriate process to integrate this material after the deposition of the GMR multilayer. To characterize the magnetic properties measurements with a Vibrating Sample Magnetometer (VSM) as well as a hysteresisgraph were carried out.
KW - Giant magnetoresistive sensor
KW - magnetic flux guide
KW - soft magnetic materials
KW - spin valve
UR - http://www.scopus.com/inward/record.url?scp=84859195342&partnerID=8YFLogxK
U2 - 10.1109/TMAG.2011.2173179
DO - 10.1109/TMAG.2011.2173179
M3 - Article
AN - SCOPUS:84859195342
VL - 48
SP - 1481
EP - 1484
JO - IEEE transactions on magnetics
JF - IEEE transactions on magnetics
SN - 0018-9464
IS - 4
M1 - 6172423
ER -