Details
| Translated title of the contribution | Design and Fabrication of an Acoustic Transducer based on a Polymer Membrane |
|---|---|
| Original language | German |
| Title of host publication | MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings |
| Publisher | VDE Verlag GmbH |
| Pages | 606-609 |
| Number of pages | 4 |
| ISBN (electronic) | 9783800741007 |
| Publication status | Published - 2015 |
| Event | MikroSystemTechnik Kongress 2015: MEMS, Mikroelektronik, Systeme - MikroSystemTechnik Conference 2015: MEMS, Microelectronics, Systems - Karlsruhe, Germany Duration: 26 Oct 2015 → 28 Oct 2015 |
Publication series
| Name | MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings |
|---|
Abstract
A concept for an acoustic transducer based on a polymer membrane has been investigated at the Institute for Micro Production Technology at the Leibniz Universität Hannover (IMPT). For this purpose a microphone based on the capacitor principle is developed and manufactured at the IMPT. The focus of this article is on the thinfilm process development, the layout and fabrication of a prototype. The layout of the acoustic transducer is based on a plate capacitor. One electrode is fixed and used as counter electrode and the other electrode is fixed on the flexible polymer membrane.
ASJC Scopus subject areas
- Engineering(all)
- Electrical and Electronic Engineering
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Materials Science(all)
- Surfaces, Coatings and Films
- Physics and Astronomy(all)
- Condensed Matter Physics
- Physics and Astronomy(all)
- Atomic and Molecular Physics, and Optics
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MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, 2015. p. 606-609 (MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Design und Herstellung eines akustischen Wandlers mit einer Polymermembran
AU - Kaiser, Max
AU - Rechel, Mathias
AU - Goldmann, J.
AU - Rissing, Lutz
AU - Wurz, Marc Christopher
N1 - Publisher Copyright: © Technische Universität Wien.All right reserved. Copyright: Copyright 2020 Elsevier B.V., All rights reserved.
PY - 2015
Y1 - 2015
N2 - A concept for an acoustic transducer based on a polymer membrane has been investigated at the Institute for Micro Production Technology at the Leibniz Universität Hannover (IMPT). For this purpose a microphone based on the capacitor principle is developed and manufactured at the IMPT. The focus of this article is on the thinfilm process development, the layout and fabrication of a prototype. The layout of the acoustic transducer is based on a plate capacitor. One electrode is fixed and used as counter electrode and the other electrode is fixed on the flexible polymer membrane.
AB - A concept for an acoustic transducer based on a polymer membrane has been investigated at the Institute for Micro Production Technology at the Leibniz Universität Hannover (IMPT). For this purpose a microphone based on the capacitor principle is developed and manufactured at the IMPT. The focus of this article is on the thinfilm process development, the layout and fabrication of a prototype. The layout of the acoustic transducer is based on a plate capacitor. One electrode is fixed and used as counter electrode and the other electrode is fixed on the flexible polymer membrane.
UR - http://www.scopus.com/inward/record.url?scp=85096926563&partnerID=8YFLogxK
M3 - Aufsatz in Konferenzband
AN - SCOPUS:85096926563
T3 - MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings
SP - 606
EP - 609
BT - MikroSystemTechnik Kongress 2015 "MEMS, Mikroelektronik, Systeme", Proceedings
PB - VDE Verlag GmbH
T2 - MikroSystemTechnik Kongress 2015: MEMS, Mikroelektronik, Systeme - MikroSystemTechnik Conference 2015: MEMS, Microelectronics, Systems
Y2 - 26 October 2015 through 28 October 2015
ER -