Design optimization of induction heater in planetary reactors for semiconductor industry

Research output: Chapter in book/report/conference proceedingConference contributionResearch

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Original languageEnglish
Title of host publicationEnergy systems, materials and designing in mechanical engineering
Subtitle of host publicationselected, peer reviewed papers from the International Conference for Young Scientists "Electrical Engineering, Electrotechnology, Energy", June 9-12, 2015, Novosibirsk, Russia
Place of PublicationPfaffikon
Pages505-510
Publication statusPublished - 2015
EventInternational Conference for Young Scientists "Electrical Engineering, Electrotechnology, Energy" - Novosibirsk, Russian Federation
Duration: 9 Jun 201512 Jun 2015

Publication series

NameApplied mechanics and materials
Volume792

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Design optimization of induction heater in planetary reactors for semiconductor industry. / Nikanorov, Alexandre; Nacke, Bernard; Zedler, T.
Energy systems, materials and designing in mechanical engineering: selected, peer reviewed papers from the International Conference for Young Scientists "Electrical Engineering, Electrotechnology, Energy", June 9-12, 2015, Novosibirsk, Russia. Pfaffikon, 2015. p. 505-510 (Applied mechanics and materials; Vol. 792).

Research output: Chapter in book/report/conference proceedingConference contributionResearch

Nikanorov, A, Nacke, B & Zedler, T 2015, Design optimization of induction heater in planetary reactors for semiconductor industry. in Energy systems, materials and designing in mechanical engineering: selected, peer reviewed papers from the International Conference for Young Scientists "Electrical Engineering, Electrotechnology, Energy", June 9-12, 2015, Novosibirsk, Russia. Applied mechanics and materials, vol. 792, Pfaffikon, pp. 505-510, International Conference for Young Scientists "Electrical Engineering, Electrotechnology, Energy" , Novosibirsk, Russian Federation, 9 Jun 2015.
Nikanorov, A., Nacke, B., & Zedler, T. (2015). Design optimization of induction heater in planetary reactors for semiconductor industry. In Energy systems, materials and designing in mechanical engineering: selected, peer reviewed papers from the International Conference for Young Scientists "Electrical Engineering, Electrotechnology, Energy", June 9-12, 2015, Novosibirsk, Russia (pp. 505-510). (Applied mechanics and materials; Vol. 792)..
Nikanorov A, Nacke B, Zedler T. Design optimization of induction heater in planetary reactors for semiconductor industry. In Energy systems, materials and designing in mechanical engineering: selected, peer reviewed papers from the International Conference for Young Scientists "Electrical Engineering, Electrotechnology, Energy", June 9-12, 2015, Novosibirsk, Russia. Pfaffikon. 2015. p. 505-510. (Applied mechanics and materials).
Nikanorov, Alexandre ; Nacke, Bernard ; Zedler, T. / Design optimization of induction heater in planetary reactors for semiconductor industry. Energy systems, materials and designing in mechanical engineering: selected, peer reviewed papers from the International Conference for Young Scientists "Electrical Engineering, Electrotechnology, Energy", June 9-12, 2015, Novosibirsk, Russia. Pfaffikon, 2015. pp. 505-510 (Applied mechanics and materials).
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title = "Design optimization of induction heater in planetary reactors for semiconductor industry",
author = "Alexandre Nikanorov and Bernard Nacke and T. Zedler",
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AU - Nacke, Bernard

AU - Zedler, T.

PY - 2015

Y1 - 2015

M3 - Conference contribution

SN - 978-3-03835-548-9

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