Details
| Original language | English |
|---|---|
| Pages (from-to) | 646-649 |
| Number of pages | 4 |
| Journal | Microsystem Technologies |
| Volume | 12 |
| Issue number | 7 |
| Publication status | Published - 21 Feb 2006 |
Abstract
To increase the driving force as well as to reduce tolerance issues during assembly a linear hybrid step micro-actuator developed within the cooperation time was subjected to a redesign. FEM simulation results show that by doubling of the micro-actuator footprint in conjunction with a selective increase of the micro-actuator building height an increase of the driving force could be achieved. At the same time the nominal air gap could be doubled thus substantially reducing critical assembly tolerances. This paper describes redesign considerations and present FEM simulation results for the redesign.
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Hardware and Architecture
- Engineering(all)
- Electrical and Electronic Engineering
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In: Microsystem Technologies, Vol. 12, No. 7, 21.02.2006, p. 646-649.
Research output: Contribution to journal › Article › Research › peer review
}
TY - JOUR
T1 - Design improvements for a linear hybrid step micro-actuator
AU - Hahn, Matthias
AU - Gehrking, Ralf
AU - Ponick, Bernd
AU - Gatzen, Hans Heinrich
N1 - Copyright: Copyright 2008 Elsevier B.V., All rights reserved.
PY - 2006/2/21
Y1 - 2006/2/21
N2 - To increase the driving force as well as to reduce tolerance issues during assembly a linear hybrid step micro-actuator developed within the cooperation time was subjected to a redesign. FEM simulation results show that by doubling of the micro-actuator footprint in conjunction with a selective increase of the micro-actuator building height an increase of the driving force could be achieved. At the same time the nominal air gap could be doubled thus substantially reducing critical assembly tolerances. This paper describes redesign considerations and present FEM simulation results for the redesign.
AB - To increase the driving force as well as to reduce tolerance issues during assembly a linear hybrid step micro-actuator developed within the cooperation time was subjected to a redesign. FEM simulation results show that by doubling of the micro-actuator footprint in conjunction with a selective increase of the micro-actuator building height an increase of the driving force could be achieved. At the same time the nominal air gap could be doubled thus substantially reducing critical assembly tolerances. This paper describes redesign considerations and present FEM simulation results for the redesign.
UR - http://www.scopus.com/inward/record.url?scp=33646943938&partnerID=8YFLogxK
U2 - 10.1007/s00542-006-0086-2
DO - 10.1007/s00542-006-0086-2
M3 - Article
AN - SCOPUS:33646943938
VL - 12
SP - 646
EP - 649
JO - Microsystem Technologies
JF - Microsystem Technologies
SN - 0946-7076
IS - 7
ER -