Details
| Original language | English |
|---|---|
| Title of host publication | IEEE Sensors 2009 Conference - SENSORS 2009 |
| Pages | 1915-1918 |
| Number of pages | 4 |
| Publication status | Published - Dec 2009 |
| Event | IEEE Sensors 2009 Conference - SENSORS 2009 - Christchurch, New Zealand Duration: 25 Oct 2009 → 28 Oct 2009 |
Publication series
| Name | Proceedings of IEEE Sensors |
|---|
Abstract
The development of a capacitive sensor for controlling the gap of contactless guides in microactuators is presented in this paper. The counter electrode of the capacitive air gap sensor is kept free from electric leads and the dimension of the active region of the sensor is 445 μm x 950 μm. For the fabrication of the sensor, thin-film processes were applied. The capacitance at the upper measurement range of 15 μm represents 125 fF. An appropriate evaluating circuit provides enough resolution to operate at the pre-defined gap of 7 μm.
ASJC Scopus subject areas
- Engineering(all)
- Electrical and Electronic Engineering
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IEEE Sensors 2009 Conference - SENSORS 2009. 2009. p. 1915-1918 (Proceedings of IEEE Sensors).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Design, Fabrication, and Calibration of Capacitive Air Gap Sensors for the Application in Levitation based Guides in Microactuators
AU - Denkena, Berend
AU - Kayapinar, Haydar
AU - Gatzen, Hans Heinrich
AU - Pape, Florian
PY - 2009/12
Y1 - 2009/12
N2 - The development of a capacitive sensor for controlling the gap of contactless guides in microactuators is presented in this paper. The counter electrode of the capacitive air gap sensor is kept free from electric leads and the dimension of the active region of the sensor is 445 μm x 950 μm. For the fabrication of the sensor, thin-film processes were applied. The capacitance at the upper measurement range of 15 μm represents 125 fF. An appropriate evaluating circuit provides enough resolution to operate at the pre-defined gap of 7 μm.
AB - The development of a capacitive sensor for controlling the gap of contactless guides in microactuators is presented in this paper. The counter electrode of the capacitive air gap sensor is kept free from electric leads and the dimension of the active region of the sensor is 445 μm x 950 μm. For the fabrication of the sensor, thin-film processes were applied. The capacitance at the upper measurement range of 15 μm represents 125 fF. An appropriate evaluating circuit provides enough resolution to operate at the pre-defined gap of 7 μm.
UR - http://www.scopus.com/inward/record.url?scp=77951099317&partnerID=8YFLogxK
U2 - 10.1109/ICSENS.2009.5398366
DO - 10.1109/ICSENS.2009.5398366
M3 - Conference contribution
AN - SCOPUS:77951099317
SN - 9781424445486
T3 - Proceedings of IEEE Sensors
SP - 1915
EP - 1918
BT - IEEE Sensors 2009 Conference - SENSORS 2009
T2 - IEEE Sensors 2009 Conference - SENSORS 2009
Y2 - 25 October 2009 through 28 October 2009
ER -