Details
| Original language | English |
|---|---|
| Title of host publication | Optically Induced Nanostructures |
| Subtitle of host publication | Biomedical and Technical Applications |
| Publisher | Walter de Gruyter GmbH |
| Pages | 73-92 |
| Number of pages | 20 |
| ISBN (electronic) | 9783110354324 |
| ISBN (print) | 9783110337181 |
| Publication status | Published - May 2015 |
| Externally published | Yes |
Abstract
In recent years, technological progress in nanotechnology has pushed struc-ture sizes to its limits. As an example, in the semiconductor industry, structures well below 100 nm are routinely produced. The characterization of such structures is a de-manding and very important task. Classical microscopy methods do not allow direct imaging in this regime because of the Abbe diffraction limit. Nevertheless, charac-terization of sub-wavelength structures in the far-field is possible using interferomet-ric Fourier transform scatterometry (IFTS) combined with numerical simulation in a feedback loop. Here, we show that the resolution of this method can be considerably enhanced by use of additional plasmonic nanoantennae structures which transform scattering near-field information into the optical far-field. These structures were real-ized using different photofabrication approaches.
ASJC Scopus subject areas
- Physics and Astronomy(all)
- General Physics and Astronomy
- Engineering(all)
- General Engineering
- Biochemistry, Genetics and Molecular Biology(all)
- General Biochemistry,Genetics and Molecular Biology
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Optically Induced Nanostructures: Biomedical and Technical Applications. Walter de Gruyter GmbH, 2015. p. 73-92.
Research output: Chapter in book/report/conference proceeding › Contribution to book/anthology › Research › peer review
}
TY - CHAP
T1 - Design and fabrication of near-to far-field transformers by sub-100 nm two-photon polymerization
AU - Reinhardt, C.
AU - Paz, V. Ferreras
AU - Zheng, L.
AU - Kurselis, K.
AU - Birr, T.
AU - Zywietz, U.
AU - Chichkov, B.
AU - Frenner, K.
AU - Osten, W.
PY - 2015/5
Y1 - 2015/5
N2 - In recent years, technological progress in nanotechnology has pushed struc-ture sizes to its limits. As an example, in the semiconductor industry, structures well below 100 nm are routinely produced. The characterization of such structures is a de-manding and very important task. Classical microscopy methods do not allow direct imaging in this regime because of the Abbe diffraction limit. Nevertheless, charac-terization of sub-wavelength structures in the far-field is possible using interferomet-ric Fourier transform scatterometry (IFTS) combined with numerical simulation in a feedback loop. Here, we show that the resolution of this method can be considerably enhanced by use of additional plasmonic nanoantennae structures which transform scattering near-field information into the optical far-field. These structures were real-ized using different photofabrication approaches.
AB - In recent years, technological progress in nanotechnology has pushed struc-ture sizes to its limits. As an example, in the semiconductor industry, structures well below 100 nm are routinely produced. The characterization of such structures is a de-manding and very important task. Classical microscopy methods do not allow direct imaging in this regime because of the Abbe diffraction limit. Nevertheless, charac-terization of sub-wavelength structures in the far-field is possible using interferomet-ric Fourier transform scatterometry (IFTS) combined with numerical simulation in a feedback loop. Here, we show that the resolution of this method can be considerably enhanced by use of additional plasmonic nanoantennae structures which transform scattering near-field information into the optical far-field. These structures were real-ized using different photofabrication approaches.
UR - http://www.scopus.com/inward/record.url?scp=84957951396&partnerID=8YFLogxK
U2 - 10.1515/9783110354324-008
DO - 10.1515/9783110354324-008
M3 - Contribution to book/anthology
AN - SCOPUS:84957951396
SN - 9783110337181
SP - 73
EP - 92
BT - Optically Induced Nanostructures
PB - Walter de Gruyter GmbH
ER -