Details
| Original language | English |
|---|---|
| Title of host publication | Integrated Optics |
| Subtitle of host publication | Devices, Materials, and Technologies XXIV |
| Editors | Sonia M. Garcia-Blanco, Pavel Cheben |
| Publisher | SPIE |
| ISBN (electronic) | 9781510633292 |
| Publication status | Published - 25 Feb 2020 |
| Externally published | Yes |
| Event | Integrated Optics: Devices, Materials, and Technologies XXIV 2020 - San Francisco, United States Duration: 3 Feb 2020 → 6 Feb 2020 |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Volume | 11283 |
| ISSN (Print) | 0277-786X |
| ISSN (electronic) | 1996-756X |
Abstract
An integrated refractive index gas sensor working in the Mid infrared (MIR) region and utilizing suspended silicon waveguide is presented. Although many integrated refractive index gas sensors have been proposed in the literatures, their operating wavelength is limited to the near infrared range. Our proposed gas sensors can operate in the mid infrared up to 10μm, were many gases have their absorption fingerprints in order to enhance the sensing performance. A finite difference solver is used to perform the sensitivity analysis of the suspended silicon waveguide in the MIR range for gaseous medium. The analysis shows that a suspended silicon waveguide can achieve high waveguide sensitivity with a minimal mode loss. Thus, we designed a high performance Mach Zehnder Interferometer (MZI) gas sensor using a suspended silicon waveguide as the sensing arm. Three dimensional finite difference time domain (3D-FDTD) solver is used in the design and optimization of two designs. One for the wavelength interrogation scheme of detection and another one for the intensity interrogation scheme. The first design, exhibits high wavelength sensitivity S=7028 nm/RIU and can reach high figure of merit (FOM) of around 180 RIU-1 for both wavelength and intensity interrogation methods with only 250μm sensing arm length. The second design furtherly enhances the intensity interrogation FOM to reach 370RIU-1 at the same length. Intensity interrogation needs only a laser source and a detector. Hence, using our sensor in intensity interrogation based read-out offers compact, low cost and mass scale fabrication which makes our proposed sensor a good platform for lab on chip technology.
Keywords
- Additive manufacturing, Aerosol jet printing, GRIN lens, Multi-material printing, Optical photopolymers, Planar optoelectronic systems
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Computer Science Applications
- Mathematics(all)
- Applied Mathematics
- Engineering(all)
- Electrical and Electronic Engineering
Cite this
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- BibTeX
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Integrated Optics: Devices, Materials, and Technologies XXIV. ed. / Sonia M. Garcia-Blanco; Pavel Cheben. SPIE, 2020. 112831K (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 11283).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Design and fabrication of multilayer GRIN lenses by multi-material additive manufacturing for light coupling applications in planar optoelectronic systems
AU - Rezaei, Hossein S.
AU - Hohenhoff, Gerrit
AU - Jaeschke, Peter
AU - Kaierle, Stefan
AU - Overmeyer, Ludger
N1 - Funding Information: We gratefully acknowledge financial support from Lower Saxony Ministry of Science and Culture (MWK) within the PhD program Tailored Light. The authors would also like to acknowledge Institut fur Transport- und Automatisierungstechnik of Leibniz University Hannover for supporting with the beam profilometry.
PY - 2020/2/25
Y1 - 2020/2/25
N2 - An integrated refractive index gas sensor working in the Mid infrared (MIR) region and utilizing suspended silicon waveguide is presented. Although many integrated refractive index gas sensors have been proposed in the literatures, their operating wavelength is limited to the near infrared range. Our proposed gas sensors can operate in the mid infrared up to 10μm, were many gases have their absorption fingerprints in order to enhance the sensing performance. A finite difference solver is used to perform the sensitivity analysis of the suspended silicon waveguide in the MIR range for gaseous medium. The analysis shows that a suspended silicon waveguide can achieve high waveguide sensitivity with a minimal mode loss. Thus, we designed a high performance Mach Zehnder Interferometer (MZI) gas sensor using a suspended silicon waveguide as the sensing arm. Three dimensional finite difference time domain (3D-FDTD) solver is used in the design and optimization of two designs. One for the wavelength interrogation scheme of detection and another one for the intensity interrogation scheme. The first design, exhibits high wavelength sensitivity S=7028 nm/RIU and can reach high figure of merit (FOM) of around 180 RIU-1 for both wavelength and intensity interrogation methods with only 250μm sensing arm length. The second design furtherly enhances the intensity interrogation FOM to reach 370RIU-1 at the same length. Intensity interrogation needs only a laser source and a detector. Hence, using our sensor in intensity interrogation based read-out offers compact, low cost and mass scale fabrication which makes our proposed sensor a good platform for lab on chip technology.
AB - An integrated refractive index gas sensor working in the Mid infrared (MIR) region and utilizing suspended silicon waveguide is presented. Although many integrated refractive index gas sensors have been proposed in the literatures, their operating wavelength is limited to the near infrared range. Our proposed gas sensors can operate in the mid infrared up to 10μm, were many gases have their absorption fingerprints in order to enhance the sensing performance. A finite difference solver is used to perform the sensitivity analysis of the suspended silicon waveguide in the MIR range for gaseous medium. The analysis shows that a suspended silicon waveguide can achieve high waveguide sensitivity with a minimal mode loss. Thus, we designed a high performance Mach Zehnder Interferometer (MZI) gas sensor using a suspended silicon waveguide as the sensing arm. Three dimensional finite difference time domain (3D-FDTD) solver is used in the design and optimization of two designs. One for the wavelength interrogation scheme of detection and another one for the intensity interrogation scheme. The first design, exhibits high wavelength sensitivity S=7028 nm/RIU and can reach high figure of merit (FOM) of around 180 RIU-1 for both wavelength and intensity interrogation methods with only 250μm sensing arm length. The second design furtherly enhances the intensity interrogation FOM to reach 370RIU-1 at the same length. Intensity interrogation needs only a laser source and a detector. Hence, using our sensor in intensity interrogation based read-out offers compact, low cost and mass scale fabrication which makes our proposed sensor a good platform for lab on chip technology.
KW - Additive manufacturing
KW - Aerosol jet printing
KW - GRIN lens
KW - Multi-material printing
KW - Optical photopolymers
KW - Planar optoelectronic systems
UR - http://www.scopus.com/inward/record.url?scp=85083369717&partnerID=8YFLogxK
U2 - 10.1117/12.2545914
DO - 10.1117/12.2545914
M3 - Conference contribution
AN - SCOPUS:85083369717
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Integrated Optics
A2 - Garcia-Blanco, Sonia M.
A2 - Cheben, Pavel
PB - SPIE
T2 - Integrated Optics: Devices, Materials, and Technologies XXIV 2020
Y2 - 3 February 2020 through 6 February 2020
ER -