Details
| Original language | English |
|---|---|
| Title of host publication | Optical Fabrication and Testing VIII |
| Editors | Eric Ruch, Reinhard Volkel |
| Publisher | SPIE |
| Number of pages | 8 |
| ISBN (electronic) | 9781510673601 |
| Publication status | Published - 17 Jun 2024 |
| Event | Optical Fabrication and Testing VIII 2024 - Strasbourg, France Duration: 8 Apr 2024 → 10 Apr 2024 |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Volume | 13021 |
| ISSN (Print) | 0277-786X |
| ISSN (electronic) | 1996-756X |
Abstract
For future development of components for the DUV/VUV spectral range, the precise knowledge of the optical transfer functions such as spectral transmission or reflection are essential. Due to the strong atmospheric absorption of radiation in this range, spectral measurements must be carried out in the absence of oxygen. Tests are usually performed in vacuum or by purging the spectrometer with an inert gas. In vacuum environment, often a radiation induced formation of hydrocarbon contaminants on the surface of the optic is observed, that deteriorates the optical functioning and leads to erroneous measurement results. We report in this article on spectrometry tests under vacuum and purge conditions and compare the results for both environmental conditions. To avoid the contamination of the optics tests were carried out in the DUV spectral range under nitrogen purging. N2 itself shows vibrational and rotational molecular absorption bands in the wavelength range from 110 nm to 150 nm, which are present as peaks with arbitrary amplitudes in the spectrometry results. Several time domain parameters such as integration time, integration range, power monitoring aspects, and frequency bandwidth of the data acquisition modules of the spectrometer are studied to investigate the origin of the disturbing peaks. Also, different polarization states of the radiation, angle resolved scattering and pressure variation of nitrogen gas are considered to adapt the test procedures for managing the presence of these absorption lines in the measured data and to obtain reliable results.
Keywords
- DUV/VUV spectrometry, ISO 15368, Molecular absorption bands, Nitrogen purge
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Computer Science Applications
- Mathematics(all)
- Applied Mathematics
- Engineering(all)
- Electrical and Electronic Engineering
Cite this
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Optical Fabrication and Testing VIII. ed. / Eric Ruch; Reinhard Volkel. SPIE, 2024. 130210I (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 13021).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Deep ultraviolet spectral photometry investigation of optical components under vacuum and nitrogen purge conditions
AU - Kadkhoda, P.
AU - Baddipaduga, P. R.
AU - Carstens, F.
AU - Wienke, A.
AU - Ristau, D.
N1 - Publisher Copyright: © 2024 SPIE.
PY - 2024/6/17
Y1 - 2024/6/17
N2 - For future development of components for the DUV/VUV spectral range, the precise knowledge of the optical transfer functions such as spectral transmission or reflection are essential. Due to the strong atmospheric absorption of radiation in this range, spectral measurements must be carried out in the absence of oxygen. Tests are usually performed in vacuum or by purging the spectrometer with an inert gas. In vacuum environment, often a radiation induced formation of hydrocarbon contaminants on the surface of the optic is observed, that deteriorates the optical functioning and leads to erroneous measurement results. We report in this article on spectrometry tests under vacuum and purge conditions and compare the results for both environmental conditions. To avoid the contamination of the optics tests were carried out in the DUV spectral range under nitrogen purging. N2 itself shows vibrational and rotational molecular absorption bands in the wavelength range from 110 nm to 150 nm, which are present as peaks with arbitrary amplitudes in the spectrometry results. Several time domain parameters such as integration time, integration range, power monitoring aspects, and frequency bandwidth of the data acquisition modules of the spectrometer are studied to investigate the origin of the disturbing peaks. Also, different polarization states of the radiation, angle resolved scattering and pressure variation of nitrogen gas are considered to adapt the test procedures for managing the presence of these absorption lines in the measured data and to obtain reliable results.
AB - For future development of components for the DUV/VUV spectral range, the precise knowledge of the optical transfer functions such as spectral transmission or reflection are essential. Due to the strong atmospheric absorption of radiation in this range, spectral measurements must be carried out in the absence of oxygen. Tests are usually performed in vacuum or by purging the spectrometer with an inert gas. In vacuum environment, often a radiation induced formation of hydrocarbon contaminants on the surface of the optic is observed, that deteriorates the optical functioning and leads to erroneous measurement results. We report in this article on spectrometry tests under vacuum and purge conditions and compare the results for both environmental conditions. To avoid the contamination of the optics tests were carried out in the DUV spectral range under nitrogen purging. N2 itself shows vibrational and rotational molecular absorption bands in the wavelength range from 110 nm to 150 nm, which are present as peaks with arbitrary amplitudes in the spectrometry results. Several time domain parameters such as integration time, integration range, power monitoring aspects, and frequency bandwidth of the data acquisition modules of the spectrometer are studied to investigate the origin of the disturbing peaks. Also, different polarization states of the radiation, angle resolved scattering and pressure variation of nitrogen gas are considered to adapt the test procedures for managing the presence of these absorption lines in the measured data and to obtain reliable results.
KW - DUV/VUV spectrometry
KW - ISO 15368
KW - Molecular absorption bands
KW - Nitrogen purge
UR - http://www.scopus.com/inward/record.url?scp=85200548033&partnerID=8YFLogxK
U2 - 10.1117/12.3021963
DO - 10.1117/12.3021963
M3 - Conference contribution
AN - SCOPUS:85200548033
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Optical Fabrication and Testing VIII
A2 - Ruch, Eric
A2 - Volkel, Reinhard
PB - SPIE
T2 - Optical Fabrication and Testing VIII 2024
Y2 - 8 April 2024 through 10 April 2024
ER -