Details
| Original language | English |
|---|---|
| Title of host publication | 2022 Solid-State Sensors, Actuators and Microsystems Workshop Technical Digest |
| Editors | Reza Ghodssi, Jenna F. Chan |
| Pages | 448-449 |
| Number of pages | 2 |
| ISBN (electronic) | 9781940470047 |
| Publication status | Published - 2022 |
| Event | 2022 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2022 - Hilton Head, United States Duration: 5 Jun 2022 → 9 Jun 2022 |
Abstract
Employing co-resonant coupling in dynamic-mode cantilever MEMS sensors has the potential for a significant increase in sensitivity while maintaining a reliable oscillation detection. However, the resulting complex interplay between the micro- and nanocantilever has to be carefully considered for application-specific sensor design as it impacts all relevant sensor properties, such as linearity, stability and detectivity. Here, an overview of key parameters, their dependence on the strength of co-resonance and resulting consequences for sensor performance is provided.
Keywords
- Cantilever sensor, co-resonant coupling, dynamic-mode, linearity, sensitivity, stability
ASJC Scopus subject areas
- Computer Science(all)
- Hardware and Architecture
- Engineering(all)
- Electrical and Electronic Engineering
Cite this
- Standard
- Harvard
- Apa
- Vancouver
- BibTeX
- RIS
2022 Solid-State Sensors, Actuators and Microsystems Workshop Technical Digest. ed. / Reza Ghodssi; Jenna F. Chan. 2022. p. 448-449.
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Co-Resonant cantilevers for materials research and sensor applications
AU - Körner, Julia
N1 - Funding Information: The reported work is funded by the German Research Foundation DFG (grant number KO5508/3-1). Furthermore, the author would like to thank Christopher F. Reiche for critical review of this manuscript.
PY - 2022
Y1 - 2022
N2 - Employing co-resonant coupling in dynamic-mode cantilever MEMS sensors has the potential for a significant increase in sensitivity while maintaining a reliable oscillation detection. However, the resulting complex interplay between the micro- and nanocantilever has to be carefully considered for application-specific sensor design as it impacts all relevant sensor properties, such as linearity, stability and detectivity. Here, an overview of key parameters, their dependence on the strength of co-resonance and resulting consequences for sensor performance is provided.
AB - Employing co-resonant coupling in dynamic-mode cantilever MEMS sensors has the potential for a significant increase in sensitivity while maintaining a reliable oscillation detection. However, the resulting complex interplay between the micro- and nanocantilever has to be carefully considered for application-specific sensor design as it impacts all relevant sensor properties, such as linearity, stability and detectivity. Here, an overview of key parameters, their dependence on the strength of co-resonance and resulting consequences for sensor performance is provided.
KW - Cantilever sensor
KW - co-resonant coupling
KW - dynamic-mode
KW - linearity
KW - sensitivity
KW - stability
UR - http://www.scopus.com/inward/record.url?scp=85172655855&partnerID=8YFLogxK
U2 - 10.31438/trf.hh2022.115
DO - 10.31438/trf.hh2022.115
M3 - Conference contribution
AN - SCOPUS:85172655855
SP - 448
EP - 449
BT - 2022 Solid-State Sensors, Actuators and Microsystems Workshop Technical Digest
A2 - Ghodssi, Reza
A2 - Chan, Jenna F.
T2 - 2022 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2022
Y2 - 5 June 2022 through 9 June 2022
ER -