Details
| Original language | English |
|---|---|
| Title of host publication | 2023 14th International Symposium on Linear Drivers for Industry Applications (LDIA) |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| ISBN (electronic) | 9798350329612 |
| ISBN (print) | 9798350329629 |
| Publication status | Published - 2023 |
| Event | 14th International Symposium on Linear Drivers for Industry Applications, LDIA 2023 - Hannover, Germany Duration: 28 Jun 2023 → 30 Jun 2023 |
Abstract
Dual-stage actuators are used in applications with high requirements for positional accuracy. One of the most widespread types of these actuators uses voice coil motors for fine positioning. In this paper, a control strategy for a dual-stage actuator consisting of two permanent magnet linear motors is investigated. The control strategy is developed based on the mechanical model of dual-stage actuator and consists of a control concept as well as a decoupling algorithm of the two stages by means of a force feedforward control and a Luenberger Disturbance Observer. With this control strategy, the two stages can finally be decoupled from each other and the fine positioner can be linearized so that its control behavior is similar to that of a voice coil motor. With this setup, the position error of a permanent magnet linear motor can be improved significantly compared to a single-stage system also using a disturbance observer.
Keywords
- dual-stage linear drive, high precision positioning, Luenberger disturbance observer, permanent magnet linear motor, robust control
ASJC Scopus subject areas
- Engineering(all)
- Electrical and Electronic Engineering
- Engineering(all)
- Industrial and Manufacturing Engineering
- Engineering(all)
- Mechanical Engineering
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2023 14th International Symposium on Linear Drivers for Industry Applications (LDIA). Institute of Electrical and Electronics Engineers Inc., 2023.
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Control of a Dual-Stage Positioning System Consisting of two Permanent Magnet Linear Motors for High-Precision Applications
AU - Luckert, Franz
AU - Dempewolf, Kay Horst
AU - Mertens, Axel
PY - 2023
Y1 - 2023
N2 - Dual-stage actuators are used in applications with high requirements for positional accuracy. One of the most widespread types of these actuators uses voice coil motors for fine positioning. In this paper, a control strategy for a dual-stage actuator consisting of two permanent magnet linear motors is investigated. The control strategy is developed based on the mechanical model of dual-stage actuator and consists of a control concept as well as a decoupling algorithm of the two stages by means of a force feedforward control and a Luenberger Disturbance Observer. With this control strategy, the two stages can finally be decoupled from each other and the fine positioner can be linearized so that its control behavior is similar to that of a voice coil motor. With this setup, the position error of a permanent magnet linear motor can be improved significantly compared to a single-stage system also using a disturbance observer.
AB - Dual-stage actuators are used in applications with high requirements for positional accuracy. One of the most widespread types of these actuators uses voice coil motors for fine positioning. In this paper, a control strategy for a dual-stage actuator consisting of two permanent magnet linear motors is investigated. The control strategy is developed based on the mechanical model of dual-stage actuator and consists of a control concept as well as a decoupling algorithm of the two stages by means of a force feedforward control and a Luenberger Disturbance Observer. With this control strategy, the two stages can finally be decoupled from each other and the fine positioner can be linearized so that its control behavior is similar to that of a voice coil motor. With this setup, the position error of a permanent magnet linear motor can be improved significantly compared to a single-stage system also using a disturbance observer.
KW - dual-stage linear drive
KW - high precision positioning
KW - Luenberger disturbance observer
KW - permanent magnet linear motor
KW - robust control
UR - http://www.scopus.com/inward/record.url?scp=85178056261&partnerID=8YFLogxK
U2 - 10.1109/LDIA59564.2023.10297456
DO - 10.1109/LDIA59564.2023.10297456
M3 - Conference contribution
AN - SCOPUS:85178056261
SN - 9798350329629
BT - 2023 14th International Symposium on Linear Drivers for Industry Applications (LDIA)
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 14th International Symposium on Linear Drivers for Industry Applications, LDIA 2023
Y2 - 28 June 2023 through 30 June 2023
ER -