Details
| Original language | English |
|---|---|
| Title of host publication | 50th Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials 2018 |
| Publisher | SPIE |
| ISBN (electronic) | 9781510621930 |
| Publication status | Published - 19 Nov 2018 |
| Event | 50th Annual Laser Damage Symposium - Laser-Induced Damage in Optical Materials 2018 - Boulder, United States Duration: 23 Sept 2018 → 26 Sept 2018 |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Volume | 10805 |
| ISSN (Print) | 0277-786X |
| ISSN (electronic) | 1996-756X |
Abstract
Particles, which contaminate the substrate during thin film deposition, are prone to cause irremovable defects and demand special attention in the field of high precision laser optics as they can lead to localized absorption and laser damage. In this contribution, we present a camera based fully in-vacuum device which continuously monitors the coating surface of a transparent test substrate under dark field illumination. We show the possibilities of this setup regarding the sensitivity to small particles (diameter 1 μm). As the first operational test of the particle monitor, singe layers of HfO 2 are grown on fused silica. By analyzing the evolution of the scattering intensity of the particles, we derive their position in the substrate-coating-system. Therefore, this in situ particle detection concept can deliver data on which process step is responsible for particle generation in multilayer films and aims to be a tool to minimize coating defects.
Keywords
- Coatings, Defects, In situ monitoring, Laser damage, Particles, Sputter deposition, Thin films
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Computer Science Applications
- Mathematics(all)
- Applied Mathematics
- Engineering(all)
- Electrical and Electronic Engineering
Cite this
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- BibTeX
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50th Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials 2018. SPIE, 2018. 108051X (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 10805).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Continuous detection of particles on a rotating substrate during thin film deposition
AU - Rüsseler, Anna Karoline
AU - Balasa, Istvan
AU - Jensen, Lars
AU - Ristau, Detlev
PY - 2018/11/19
Y1 - 2018/11/19
N2 - Particles, which contaminate the substrate during thin film deposition, are prone to cause irremovable defects and demand special attention in the field of high precision laser optics as they can lead to localized absorption and laser damage. In this contribution, we present a camera based fully in-vacuum device which continuously monitors the coating surface of a transparent test substrate under dark field illumination. We show the possibilities of this setup regarding the sensitivity to small particles (diameter 1 μm). As the first operational test of the particle monitor, singe layers of HfO 2 are grown on fused silica. By analyzing the evolution of the scattering intensity of the particles, we derive their position in the substrate-coating-system. Therefore, this in situ particle detection concept can deliver data on which process step is responsible for particle generation in multilayer films and aims to be a tool to minimize coating defects.
AB - Particles, which contaminate the substrate during thin film deposition, are prone to cause irremovable defects and demand special attention in the field of high precision laser optics as they can lead to localized absorption and laser damage. In this contribution, we present a camera based fully in-vacuum device which continuously monitors the coating surface of a transparent test substrate under dark field illumination. We show the possibilities of this setup regarding the sensitivity to small particles (diameter 1 μm). As the first operational test of the particle monitor, singe layers of HfO 2 are grown on fused silica. By analyzing the evolution of the scattering intensity of the particles, we derive their position in the substrate-coating-system. Therefore, this in situ particle detection concept can deliver data on which process step is responsible for particle generation in multilayer films and aims to be a tool to minimize coating defects.
KW - Coatings
KW - Defects
KW - In situ monitoring
KW - Laser damage
KW - Particles
KW - Sputter deposition
KW - Thin films
UR - http://www.scopus.com/inward/record.url?scp=85061066459&partnerID=8YFLogxK
U2 - 10.1117/12.2500210
DO - 10.1117/12.2500210
M3 - Conference contribution
AN - SCOPUS:85061066459
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - 50th Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials 2018
PB - SPIE
T2 - 50th Annual Laser Damage Symposium - Laser-Induced Damage in Optical Materials 2018
Y2 - 23 September 2018 through 26 September 2018
ER -