Contact passivation in silicon solar cells using atomic-layer-deposited aluminum oxide layers

Research output: Contribution to journalArticleResearchpeer review

Authors

  • Dimitri Zielke
  • Jan Hendrik Petermann
  • Florian Werner
  • Boris Veith
  • Rolf Brendel
  • Jan Schmidt

Research Organisations

External Research Organisations

  • Institute for Solar Energy Research (ISFH)
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Details

Original languageEnglish
Pages (from-to)298-300
Number of pages3
JournalPhysica Status Solidi - Rapid Research Letters
Volume5
Issue number8
Early online date13 Jul 2011
Publication statusPublished - 3 Aug 2011

Abstract

Atomic-layer-deposited aluminum oxide (AlOx) layers are implemented between the phosphorous-diffused n+-emitter and the Al contact of passivated emitter and rear silicon solar cells. The increase in open-circuit voltage Voc of 12 mV for solar cells with the Al/AlOx/n+-Si tunnel contact compared to contacts without AlOx layer indicates contact passivation by the implemented AlOx. For the optimal AlOx layer thickness of 0.24 nm we achieve an independently confirmed energy conversion efficiency of 21.7% and a Voc of 673 mV. For AlOx thicknesses larger than 0.24 nm the tunnel probability decreases, resulting in a larger series resistance.

Keywords

    Aluminum oxide, Atomic layer deposition, Contact passivation, Silicon, Solar cells

ASJC Scopus subject areas

Cite this

Contact passivation in silicon solar cells using atomic-layer-deposited aluminum oxide layers. / Zielke, Dimitri; Petermann, Jan Hendrik; Werner, Florian et al.
In: Physica Status Solidi - Rapid Research Letters, Vol. 5, No. 8, 03.08.2011, p. 298-300.

Research output: Contribution to journalArticleResearchpeer review

Zielke D, Petermann JH, Werner F, Veith B, Brendel R, Schmidt J. Contact passivation in silicon solar cells using atomic-layer-deposited aluminum oxide layers. Physica Status Solidi - Rapid Research Letters. 2011 Aug 3;5(8):298-300. Epub 2011 Jul 13. doi: 10.1002/pssr.201105285
Zielke, Dimitri ; Petermann, Jan Hendrik ; Werner, Florian et al. / Contact passivation in silicon solar cells using atomic-layer-deposited aluminum oxide layers. In: Physica Status Solidi - Rapid Research Letters. 2011 ; Vol. 5, No. 8. pp. 298-300.
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AU - Werner, Florian

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AU - Brendel, Rolf

AU - Schmidt, Jan

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