Details
| Original language | English |
|---|---|
| Title of host publication | 46th Annual 2008 IEEE International Reliability Physics Symposium Proceedings, IRPS |
| Pages | 675-676 |
| Number of pages | 2 |
| Publication status | Published - 2008 |
| Event | 46th Annual 2008 IEEE International Reliability Physics Symposium, IRPS - Phoenix, AZ, United States Duration: 27 Apr 2008 → 1 May 2008 |
Publication series
| Name | IEEE International Reliability Physics Symposium Proceedings |
|---|---|
| ISSN (Print) | 1541-7026 |
ASJC Scopus subject areas
- Engineering(all)
- General Engineering
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46th Annual 2008 IEEE International Reliability Physics Symposium Proceedings, IRPS. 2008. p. 675-676 4558983 (IEEE International Reliability Physics Symposium Proceedings).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Comprehensive reliability analysis of CoWP metal Cap unit processes for high volume production in sub-μm dimensions
AU - Aubel, O.
AU - Thierbach, S.
AU - Seidel, R.
AU - Freudenberg, B.
AU - Meyer, M. A.
AU - Feustel, F.
AU - Poppe, J.
AU - Nopper, M.
AU - Preusse, A.
AU - Zistl, C.
AU - Weide-Zaage, K.
N1 - Copyright: Copyright 2008 Elsevier B.V., All rights reserved.
PY - 2008
Y1 - 2008
UR - http://www.scopus.com/inward/record.url?scp=51549087383&partnerID=8YFLogxK
U2 - 10.1109/RELPHY.2008.4558983
DO - 10.1109/RELPHY.2008.4558983
M3 - Conference contribution
AN - SCOPUS:51549087383
SN - 9781424420506
T3 - IEEE International Reliability Physics Symposium Proceedings
SP - 675
EP - 676
BT - 46th Annual 2008 IEEE International Reliability Physics Symposium Proceedings, IRPS
T2 - 46th Annual 2008 IEEE International Reliability Physics Symposium, IRPS
Y2 - 27 April 2008 through 1 May 2008
ER -