Comparison of algorithms used for optical characterization of multilayer optical coatings

Research output: Contribution to journal › Article › Research › peer review

Authors

  • Tatiana V. Amotchkina
  • Michael K. Trubetskov
  • Vladimir Pervak
  • Sebastian Schlichting
  • Henrik Ehlers
  • Detlev Ristau
  • Alexander V. Tikhonravov

Research Organisations

External Research Organisations

  • Lomonosov Moscow State University
  • Ludwig-Maximilians-Universität München (LMU)
  • Laser Zentrum Hannover e.V. (LZH)
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Details

Original languageEnglish
Pages (from-to)3389-3395
Number of pages7
JournalApplied Optics
Volume50
Issue number20
Publication statusPublished - 10 Jul 2011

Abstract

Two algorithms used for the on-line and off-line characterization of multilayer optical coatings are experimentally compared using test samples produced by two different deposition processes and different monitoring approaches. One of these algorithms, called the triangular algorithm, demonstrates its superiority in all considered situations. We performed experiments with multilayer samples formed by high-density thin films, which allowed us to neglect possible errors in the film refractive indices and concentrate only on errors in the thicknesses of the layers of the produced coatings.

ASJC Scopus subject areas

Cite this

Comparison of algorithms used for optical characterization of multilayer optical coatings. / Amotchkina, Tatiana V.; Trubetskov, Michael K.; Pervak, Vladimir et al.
In: Applied Optics, Vol. 50, No. 20, 10.07.2011, p. 3389-3395.

Research output: Contribution to journal › Article › Research › peer review

Amotchkina, TV, Trubetskov, MK, Pervak, V, Schlichting, S, Ehlers, H, Ristau, D & Tikhonravov, AV 2011, 'Comparison of algorithms used for optical characterization of multilayer optical coatings', Applied Optics, vol. 50, no. 20, pp. 3389-3395. https://doi.org/10.1364/AO.50.003389
Amotchkina, T. V., Trubetskov, M. K., Pervak, V., Schlichting, S., Ehlers, H., Ristau, D., & Tikhonravov, A. V. (2011). Comparison of algorithms used for optical characterization of multilayer optical coatings. Applied Optics, 50(20), 3389-3395. https://doi.org/10.1364/AO.50.003389
Amotchkina TV, Trubetskov MK, Pervak V, Schlichting S, Ehlers H, Ristau D et al. Comparison of algorithms used for optical characterization of multilayer optical coatings. Applied Optics. 2011 Jul 10;50(20):3389-3395. doi: 10.1364/AO.50.003389
Amotchkina, Tatiana V. ; Trubetskov, Michael K. ; Pervak, Vladimir et al. / Comparison of algorithms used for optical characterization of multilayer optical coatings. In: Applied Optics. 2011 ; Vol. 50, No. 20. pp. 3389-3395.
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