Details
| Original language | English |
|---|---|
| Title of host publication | Conference Proceedings - 14th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2014 |
| Editors | R. Leach |
| Pages | 335-338 |
| Number of pages | 4 |
| Volume | 1 |
| ISBN (electronic) | 9780956679031 |
| Publication status | Published - 4 Jun 2014 |
| Event | 14th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2014 - Dubrovnik, Croatia Duration: 2 Jun 2014 → 6 Jun 2014 |
Publication series
| Name | Conference Proceedings - 14th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2014 |
|---|---|
| Volume | 1 |
Abstract
In this paper, a compact XYC-table design for manufacturing of micro parts is presented. The drive principle is based on the selective control of different air nozzles, whose fluid jets generate feed forces for planar motion. In combination with an aerostatic contactless guide and the according control system, very precise motion with a positioning accuracy up to 270 nm and feed forces up to 1 N were achieved in an experimental test setup. Further investigations demonstrate the extension of the current system by an additional rotational degree of freedom in order to enable more complex milling operations.
Keywords
- Desktop machine, Fluidic drive, Micro milling, Planar drive, XYC-table
ASJC Scopus subject areas
- Engineering(all)
- Industrial and Manufacturing Engineering
- Engineering(all)
- Mechanical Engineering
- Materials Science(all)
- Physics and Astronomy(all)
- Instrumentation
- Environmental Science(all)
- Environmental Engineering
Cite this
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Conference Proceedings - 14th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2014. ed. / R. Leach. Vol. 1 2014. p. 335-338 (Conference Proceedings - 14th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2014; Vol. 1).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Compact XYC-table fluid planar drive system for micro milling
AU - Denkena, B.
AU - Litwinski, K. M.
AU - Bergmeier, M.
PY - 2014/6/4
Y1 - 2014/6/4
N2 - In this paper, a compact XYC-table design for manufacturing of micro parts is presented. The drive principle is based on the selective control of different air nozzles, whose fluid jets generate feed forces for planar motion. In combination with an aerostatic contactless guide and the according control system, very precise motion with a positioning accuracy up to 270 nm and feed forces up to 1 N were achieved in an experimental test setup. Further investigations demonstrate the extension of the current system by an additional rotational degree of freedom in order to enable more complex milling operations.
AB - In this paper, a compact XYC-table design for manufacturing of micro parts is presented. The drive principle is based on the selective control of different air nozzles, whose fluid jets generate feed forces for planar motion. In combination with an aerostatic contactless guide and the according control system, very precise motion with a positioning accuracy up to 270 nm and feed forces up to 1 N were achieved in an experimental test setup. Further investigations demonstrate the extension of the current system by an additional rotational degree of freedom in order to enable more complex milling operations.
KW - Desktop machine
KW - Fluidic drive
KW - Micro milling
KW - Planar drive
KW - XYC-table
UR - http://www.scopus.com/inward/record.url?scp=84923184878&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:84923184878
VL - 1
T3 - Conference Proceedings - 14th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2014
SP - 335
EP - 338
BT - Conference Proceedings - 14th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2014
A2 - Leach, R.
T2 - 14th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2014
Y2 - 2 June 2014 through 6 June 2014
ER -