Details
| Original language | English |
|---|---|
| Title of host publication | Laser-Induced Damage in Optical Materials: 1999 |
| Subtitle of host publication | 4 - 7 October 1999, Boulder, Colorado ; proceedings |
| Place of Publication | Bellingham |
| Publisher | SPIE |
| Pages | 514-527 |
| Number of pages | 14 |
| ISBN (print) | 0-8194-3508-2 |
| Publication status | Published - 3 Mar 2000 |
| Externally published | Yes |
| Event | 31st Annual Boulder Damage Symposium: 'Laser-Induced Damage in Optical Materials 1999' - Boulder, CO, USA Duration: 4 Oct 1999 → 7 Oct 1999 |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Publisher | SPIE |
| Volume | 3902 |
| ISSN (Print) | 0277-786X |
Abstract
Recent developments of DUV-excimer laser applications have gained in demands for radiation resistant coated components at interesting wavelengths. To meet the requirements of long term reliability and high pulse number throughput superior performance of the optical components with lowest absorption and scattering losses are necessary. In the framework of the German Joint Research Project OPUS II efforts are made to investigate the optical properties, the radiation resistance and long term stability of single layers and layer systems of interest in the DUV. The evaluation of optical coatings and coating systems (AR and HR) on different substrate materials was carried out by scattering experiments, atomic force microscopy, infrared spectroscopy, calorimetric absorption measurements, and determination of laser induced damage threshold (1-on-1, 1000-on-1). Additionally from the spectralphotometric measurements the optical behaviour of the films was examined.
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Computer Science Applications
- Mathematics(all)
- Applied Mathematics
- Engineering(all)
- Electrical and Electronic Engineering
Cite this
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Laser-Induced Damage in Optical Materials: 1999: 4 - 7 October 1999, Boulder, Colorado ; proceedings. Bellingham: SPIE, 2000. p. 514-527 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 3902).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Coated optics for DUV-excimer laser applications
AU - Ullmann, Jens
AU - Mertin, Michael
AU - Lauth, Hans
AU - Bernitzki, Helmut
AU - Mann, Klaus R.
AU - Ristau, Detlev
AU - Arens, Winfried
AU - Thielsch, Roland
AU - Kaiser, Norbert
PY - 2000/3/3
Y1 - 2000/3/3
N2 - Recent developments of DUV-excimer laser applications have gained in demands for radiation resistant coated components at interesting wavelengths. To meet the requirements of long term reliability and high pulse number throughput superior performance of the optical components with lowest absorption and scattering losses are necessary. In the framework of the German Joint Research Project OPUS II efforts are made to investigate the optical properties, the radiation resistance and long term stability of single layers and layer systems of interest in the DUV. The evaluation of optical coatings and coating systems (AR and HR) on different substrate materials was carried out by scattering experiments, atomic force microscopy, infrared spectroscopy, calorimetric absorption measurements, and determination of laser induced damage threshold (1-on-1, 1000-on-1). Additionally from the spectralphotometric measurements the optical behaviour of the films was examined.
AB - Recent developments of DUV-excimer laser applications have gained in demands for radiation resistant coated components at interesting wavelengths. To meet the requirements of long term reliability and high pulse number throughput superior performance of the optical components with lowest absorption and scattering losses are necessary. In the framework of the German Joint Research Project OPUS II efforts are made to investigate the optical properties, the radiation resistance and long term stability of single layers and layer systems of interest in the DUV. The evaluation of optical coatings and coating systems (AR and HR) on different substrate materials was carried out by scattering experiments, atomic force microscopy, infrared spectroscopy, calorimetric absorption measurements, and determination of laser induced damage threshold (1-on-1, 1000-on-1). Additionally from the spectralphotometric measurements the optical behaviour of the films was examined.
UR - http://www.scopus.com/inward/record.url?scp=0033878136&partnerID=8YFLogxK
U2 - 10.1117/12.379348
DO - 10.1117/12.379348
M3 - Conference contribution
AN - SCOPUS:0033878136
SN - 0-8194-3508-2
T3 - Proceedings of SPIE - The International Society for Optical Engineering
SP - 514
EP - 527
BT - Laser-Induced Damage in Optical Materials: 1999
PB - SPIE
CY - Bellingham
T2 - 31st Annual Boulder Damage Symposium: 'Laser-Induced Damage in Optical Materials 1999'
Y2 - 4 October 1999 through 7 October 1999
ER -