Characterization of Microtransformers with Magnetic Ni-Fe-W alloy Cores Plated at Two Different Substrate Temperatures

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External Research Organisations

  • Malaviya National Institute of Technology
  • Würth Elektronik eiSos GmbH & Co. KG
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Details

Original languageEnglish
Article number113454
JournalSensors and Actuators A: Physical
Volume338
Early online date17 Feb 2022
Publication statusPublished - 1 May 2022

Abstract

The electroplating technique is used to realize microtransformers on a SiO2 wafer. The magnetic core of these microtransformers is deposited at a substrate temperature of 5 °C and 21 °C, while the core material is the same. For the fabrication of the magnetic core (3 µm thick), Ni-Fe-W alloy film is utilized. These fabricated transformers show changes in performance due to variations in core properties. The transformers whose core is fabricated at substrate temperature 21 °C have a significantly higher inductance than the microtransformers whose core is fabricated at a substrate temperature of 5 °C. However, the core fabricated at 5 °C has better magnetic properties than the core fabricated at 21 °C. An impedance analyzer is employed for the characterization of transformers. A signal of 5 mA at 1 MHz is used to obtain the inductance of transformers. The maximum inductance of transformers in which cores are fabricated at 5 °C and 21 °C are 54 nH and 68 nH and almost continuous up to 30 MHz, respectively. A maximum quality factor of 3.51 is attained at 15 MHz.

Keywords

    Electroplating technique, Microtransformers, Ni-Fe-W alloy core, Substrate temperature

ASJC Scopus subject areas

Cite this

Characterization of Microtransformers with Magnetic Ni-Fe-W alloy Cores Plated at Two Different Substrate Temperatures. / Mundotiya, Brij Mohan; Dinulovic, Dragan; Rissing, Lutz et al.
In: Sensors and Actuators A: Physical, Vol. 338, 113454, 01.05.2022.

Research output: Contribution to journalArticleResearchpeer review

Mundotiya BM, Dinulovic D, Rissing L, Wurz MC. Characterization of Microtransformers with Magnetic Ni-Fe-W alloy Cores Plated at Two Different Substrate Temperatures. Sensors and Actuators A: Physical. 2022 May 1;338:113454. Epub 2022 Feb 17. doi: 10.1016/j.sna.2022.113454
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abstract = "The electroplating technique is used to realize microtransformers on a SiO2 wafer. The magnetic core of these microtransformers is deposited at a substrate temperature of 5 °C and 21 °C, while the core material is the same. For the fabrication of the magnetic core (3 µm thick), Ni-Fe-W alloy film is utilized. These fabricated transformers show changes in performance due to variations in core properties. The transformers whose core is fabricated at substrate temperature 21 °C have a significantly higher inductance than the microtransformers whose core is fabricated at a substrate temperature of 5 °C. However, the core fabricated at 5 °C has better magnetic properties than the core fabricated at 21 °C. An impedance analyzer is employed for the characterization of transformers. A signal of 5 mA at 1 MHz is used to obtain the inductance of transformers. The maximum inductance of transformers in which cores are fabricated at 5 °C and 21 °C are 54 nH and 68 nH and almost continuous up to 30 MHz, respectively. A maximum quality factor of 3.51 is attained at 15 MHz.",
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AU - Dinulovic, Dragan

AU - Rissing, Lutz

AU - Wurz, Marc Christopher

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