Details
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007 |
| Pages | 364-367 |
| Number of pages | 4 |
| Volume | 2 |
| ISBN (electronic) | 0955308224, 9780955308222 |
| Publication status | Published - 2007 |
| Externally published | Yes |
| Event | 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007 - Bremen, Germany Duration: 20 May 2007 → 24 May 2007 |
Abstract
The paper describes the design of a system for the automated assembly of hybrid microsystems and the accuracies of the components. The influences on the accuracy will be analyzed on the basis of an example for an automated assembly process. While the object sizes reach centimeter range, they have to be assembled with an assembly accuracy of only a few micrometers. A relative positioning accuracy of 0.8 ìm is reached in this process.
ASJC Scopus subject areas
- Materials Science(all)
- Physics and Astronomy(all)
- Instrumentation
- Environmental Science(all)
- Environmental Engineering
- Engineering(all)
- Industrial and Manufacturing Engineering
- Engineering(all)
- Mechanical Engineering
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Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007. Vol. 2 2007. p. 364-367.
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Automated assembly of hybrid microsystems
AU - Schöttler, Kerstin
AU - Rathmann, Sven
AU - Raatz, Annika
AU - Hesselbach, Jürgen
PY - 2007
Y1 - 2007
N2 - The paper describes the design of a system for the automated assembly of hybrid microsystems and the accuracies of the components. The influences on the accuracy will be analyzed on the basis of an example for an automated assembly process. While the object sizes reach centimeter range, they have to be assembled with an assembly accuracy of only a few micrometers. A relative positioning accuracy of 0.8 ìm is reached in this process.
AB - The paper describes the design of a system for the automated assembly of hybrid microsystems and the accuracies of the components. The influences on the accuracy will be analyzed on the basis of an example for an automated assembly process. While the object sizes reach centimeter range, they have to be assembled with an assembly accuracy of only a few micrometers. A relative positioning accuracy of 0.8 ìm is reached in this process.
UR - http://www.scopus.com/inward/record.url?scp=84908237104&partnerID=8YFLogxK
U2 - 10.15488/13313
DO - 10.15488/13313
M3 - Conference contribution
AN - SCOPUS:84908237104
VL - 2
SP - 364
EP - 367
BT - Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007
T2 - 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007
Y2 - 20 May 2007 through 24 May 2007
ER -