Assembly of micro systems with the high precision robot parvus

Research output: Contribution to conferencePaperResearchpeer review

Authors

External Research Organisations

  • Technische Universität Braunschweig
  • Micromotion GmbH
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Details

Original languageEnglish
Publication statusPublished - 2007
Externally publishedYes
EventSmart Systems Integration 2007 - European Conference and Exhibition on Integration Issues of Miniaturized Systems: MEMS, MOEMS, ICs and Electronic Components, SSI 2007 - Paris, France
Duration: 27 Mar 200728 Mar 2007

Conference

ConferenceSmart Systems Integration 2007 - European Conference and Exhibition on Integration Issues of Miniaturized Systems: MEMS, MOEMS, ICs and Electronic Components, SSI 2007
Country/TerritoryFrance
CityParis
Period27 Mar 200728 Mar 2007

ASJC Scopus subject areas

Cite this

Assembly of micro systems with the high precision robot parvus. / Burisch, Arne; Degen, Reinhard; Hesselbach, Jürgen et al.
2007. Paper presented at Smart Systems Integration 2007 - European Conference and Exhibition on Integration Issues of Miniaturized Systems: MEMS, MOEMS, ICs and Electronic Components, SSI 2007, Paris, France.

Research output: Contribution to conferencePaperResearchpeer review

Burisch, A, Degen, R, Hesselbach, J & Raatz, A 2007, 'Assembly of micro systems with the high precision robot parvus', Paper presented at Smart Systems Integration 2007 - European Conference and Exhibition on Integration Issues of Miniaturized Systems: MEMS, MOEMS, ICs and Electronic Components, SSI 2007, Paris, France, 27 Mar 2007 - 28 Mar 2007. https://doi.org//10.15488/13307
Burisch, A., Degen, R., Hesselbach, J., & Raatz, A. (2007). Assembly of micro systems with the high precision robot parvus. Paper presented at Smart Systems Integration 2007 - European Conference and Exhibition on Integration Issues of Miniaturized Systems: MEMS, MOEMS, ICs and Electronic Components, SSI 2007, Paris, France. https://doi.org//10.15488/13307
Burisch A, Degen R, Hesselbach J, Raatz A. Assembly of micro systems with the high precision robot parvus. 2007. Paper presented at Smart Systems Integration 2007 - European Conference and Exhibition on Integration Issues of Miniaturized Systems: MEMS, MOEMS, ICs and Electronic Components, SSI 2007, Paris, France. doi: /10.15488/13307
Burisch, Arne ; Degen, Reinhard ; Hesselbach, Jürgen et al. / Assembly of micro systems with the high precision robot parvus. Paper presented at Smart Systems Integration 2007 - European Conference and Exhibition on Integration Issues of Miniaturized Systems: MEMS, MOEMS, ICs and Electronic Components, SSI 2007, Paris, France.
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author = "Arne Burisch and Reinhard Degen and J{\"u}rgen Hesselbach and Annika Raatz",
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note = "Smart Systems Integration 2007 - European Conference and Exhibition on Integration Issues of Miniaturized Systems: MEMS, MOEMS, ICs and Electronic Components, SSI 2007 ; Conference date: 27-03-2007 Through 28-03-2007",

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AU - Degen, Reinhard

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AU - Raatz, Annika

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