Assembly of a novel MEMS-based 3D vibrating micro-scale co-ordinate measuring machine probe using desktop factory automation

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Authors

  • James D. Claverley
  • Dong Yea Sheu
  • Arne Burisch
  • Richard K. Leach
  • Annika Raatz

External Research Organisations

  • National Physical Laboratory (NPL)
  • National Taipei University of Technology
  • Technische Universität Braunschweig
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Details

Original languageEnglish
Title of host publicationProceedings
Subtitle of host publication2011 IEEE International Symposium on Assembly and Manufacturing, ISAM 2011
Publication statusPublished - 30 Aug 2011
Externally publishedYes
Event2011 IEEE International Symposium on Assembly and Manufacturing, ISAM 2011 - Tampere, Finland
Duration: 25 May 201127 May 2011

Publication series

NameProceedings - 2011 IEEE International Symposium on Assembly and Manufacturing, ISAM 2011

Abstract

In this paper the assembly of a novel micro-scale coordinate measuring machine (CMM) probe is considered. A working micro-scale CMM probe is assembled from a MEMS device and a stylus produced by micro-electro-discharge machining. The production technique of the micro-scale parts is discussed and two methods for assembly are presented.

Keywords

    desktop factory, MEMS, micro-assembly, micro-CMM, prototyping, semi-automation

ASJC Scopus subject areas

Cite this

Assembly of a novel MEMS-based 3D vibrating micro-scale co-ordinate measuring machine probe using desktop factory automation. / Claverley, James D.; Sheu, Dong Yea; Burisch, Arne et al.
Proceedings: 2011 IEEE International Symposium on Assembly and Manufacturing, ISAM 2011. 2011. 5942327 (Proceedings - 2011 IEEE International Symposium on Assembly and Manufacturing, ISAM 2011).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Claverley, JD, Sheu, DY, Burisch, A, Leach, RK & Raatz, A 2011, Assembly of a novel MEMS-based 3D vibrating micro-scale co-ordinate measuring machine probe using desktop factory automation. in Proceedings: 2011 IEEE International Symposium on Assembly and Manufacturing, ISAM 2011., 5942327, Proceedings - 2011 IEEE International Symposium on Assembly and Manufacturing, ISAM 2011, 2011 IEEE International Symposium on Assembly and Manufacturing, ISAM 2011, Tampere, Finland, 25 May 2011. https://doi.org/10.1109/ISAM.2011.5942327
Claverley, J. D., Sheu, D. Y., Burisch, A., Leach, R. K., & Raatz, A. (2011). Assembly of a novel MEMS-based 3D vibrating micro-scale co-ordinate measuring machine probe using desktop factory automation. In Proceedings: 2011 IEEE International Symposium on Assembly and Manufacturing, ISAM 2011 Article 5942327 (Proceedings - 2011 IEEE International Symposium on Assembly and Manufacturing, ISAM 2011). https://doi.org/10.1109/ISAM.2011.5942327
Claverley JD, Sheu DY, Burisch A, Leach RK, Raatz A. Assembly of a novel MEMS-based 3D vibrating micro-scale co-ordinate measuring machine probe using desktop factory automation. In Proceedings: 2011 IEEE International Symposium on Assembly and Manufacturing, ISAM 2011. 2011. 5942327. (Proceedings - 2011 IEEE International Symposium on Assembly and Manufacturing, ISAM 2011). doi: 10.1109/ISAM.2011.5942327
Claverley, James D. ; Sheu, Dong Yea ; Burisch, Arne et al. / Assembly of a novel MEMS-based 3D vibrating micro-scale co-ordinate measuring machine probe using desktop factory automation. Proceedings: 2011 IEEE International Symposium on Assembly and Manufacturing, ISAM 2011. 2011. (Proceedings - 2011 IEEE International Symposium on Assembly and Manufacturing, ISAM 2011).
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