Antimony-mediated growth of epitaxial Ge1-yCy layers on Si(001)

Research output: Contribution to journalArticleResearchpeer review

Authors

  • H. J. Osten
  • E. Bugiel
  • P. Zaumseil

External Research Organisations

  • Leibniz Institute for High Performance Microelectronics (IHP)
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Details

Original languageEnglish
Pages (from-to)322-326
Number of pages5
JournalJournal of crystal growth
Volume142
Issue number3-4
Publication statusPublished - 2 Sept 1994
Externally publishedYes

Abstract

Ge1-yCy layers were grown epitaxially on Si(001) with molecular beam epitaxy. The Stranski-Krastanov islanding can be completely suppressed by using the surfactant growth technique. We could not observe any interference between the presence of the antimony monolayer and the carbon incorporation into the growing Ge layer. The degree of relaxation determined independent of X-ray diffraction and transmission electron microscopy investigations is surprisingly low. Also, the onset of relaxation is significantly delayed. The Ge1-yCy layer does not behave identically with a pseudomorphic Ge film with an artificially reduced strain; it should therefore rather be considered as a new material with its own specific strain degree.

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Cite this

Antimony-mediated growth of epitaxial Ge1-yCy layers on Si(001). / Osten, H. J.; Bugiel, E.; Zaumseil, P.
In: Journal of crystal growth, Vol. 142, No. 3-4, 02.09.1994, p. 322-326.

Research output: Contribution to journalArticleResearchpeer review

Osten HJ, Bugiel E, Zaumseil P. Antimony-mediated growth of epitaxial Ge1-yCy layers on Si(001). Journal of crystal growth. 1994 Sept 2;142(3-4):322-326. doi: 10.1016/0022-0248(94)90339-5
Osten, H. J. ; Bugiel, E. ; Zaumseil, P. / Antimony-mediated growth of epitaxial Ge1-yCy layers on Si(001). In: Journal of crystal growth. 1994 ; Vol. 142, No. 3-4. pp. 322-326.
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