Details
| Translated title of the contribution | Anodic dissolution of aluminium as downsizing technique for micro-inductors |
|---|---|
| Original language | German |
| Title of host publication | MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings |
| Publisher | VDE Verlag GmbH |
| Pages | 624-627 |
| Number of pages | 4 |
| ISBN (electronic) | 9783800744916 |
| Publication status | Published - 2017 |
| Event | MikroSystemTechnik Kongress 2017: MEMS, Mikroelektronik, Systeme - München, Germany Duration: 23 Oct 2017 → 25 Oct 2017 |
Publication series
| Name | MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings |
|---|
Abstract
Into this paper a new approach to miniaturize passive components especially micro-inductors is presented. The main extension of process flow is the anodic dissolution of aluminium at a sodiumchloride solution. As example to show the technological innovation a micro-inductors is choosen. The technique allowed a reduction of the volume from 2.8 mm3 to 0.45 mm3.
ASJC Scopus subject areas
- Engineering(all)
- Electrical and Electronic Engineering
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Materials Science(all)
- Surfaces, Coatings and Films
- Physics and Astronomy(all)
- Condensed Matter Physics
- Physics and Astronomy(all)
- Atomic and Molecular Physics, and Optics
Cite this
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MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings. VDE Verlag GmbH, 2017. p. 624-627 (MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Anodische auflösung von aluminium als downsizing technik für mikro-induktivitäten
AU - Beringer, Sebastian
AU - Dinulovic, Dragan
AU - Bengsch, Sebastian
AU - Haug, Martin
AU - Wurz, Marc Christopher
N1 - Publisher Copyright: © VDE VERLAG GMBH ∙ Berlin ∙ Offenbach Copyright: Copyright 2020 Elsevier B.V., All rights reserved.
PY - 2017
Y1 - 2017
N2 - Into this paper a new approach to miniaturize passive components especially micro-inductors is presented. The main extension of process flow is the anodic dissolution of aluminium at a sodiumchloride solution. As example to show the technological innovation a micro-inductors is choosen. The technique allowed a reduction of the volume from 2.8 mm3 to 0.45 mm3.
AB - Into this paper a new approach to miniaturize passive components especially micro-inductors is presented. The main extension of process flow is the anodic dissolution of aluminium at a sodiumchloride solution. As example to show the technological innovation a micro-inductors is choosen. The technique allowed a reduction of the volume from 2.8 mm3 to 0.45 mm3.
UR - http://www.scopus.com/inward/record.url?scp=85096755624&partnerID=8YFLogxK
M3 - Aufsatz in Konferenzband
AN - SCOPUS:85096755624
T3 - MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings
SP - 624
EP - 627
BT - MikroSystemTechnik Kongress 2017 "MEMS, Mikroelektronik, Systeme", Proceedings
PB - VDE Verlag GmbH
T2 - MikroSystemTechnik Kongress 2017: MEMS, Mikroelektronik, Systeme
Y2 - 23 October 2017 through 25 October 2017
ER -